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Appl. Phys. Lett. 96, 163503 (2010); http://dx.doi.org/10.1063/1.3393999 (3 pages)

Stress-based vapor sensing using resonant microbridges

D. R. Southworth, L. M. Bellan, Y. Linzon, H. G. Craighead, and J. M. Parpia

Center for Materials Research, Cornell University, Ithaca, New York 14853, USA

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(Received 1 March 2010; accepted 17 March 2010; published online 20 April 2010)

We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa ( ∼ 170 ppb of water vapor) and subsecond response time for coated microbridges.

© 2010 American Institute of Physics

ERRATUM

  1. Erratum: “Stress-based vapor sensing using resonant microbridges” [Appl. Phys. Lett. 96, 163503 (2010)]
    D. R. Southworth et al.
    Appl. Phys. Lett. 98, 139901 (2011)APPLAB000098000013139901000001

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KEYWORDS and PACS

PACS

  • 07.07.Df

    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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