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2 Jan 2012

Volume 100, Issue 1, Articles (01xxxx)

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Appl. Phys. Lett. 100, 013101 (2012); http://dx.doi.org/10.1063/1.3673334 (3 pages)

Patrice Genevet, Nanfang Yu, Francesco Aieta, Jiao Lin, Mikhail A. Kats, Romain Blanchard, Marlan O. Scully, Zeno Gaburro, and Federico Capasso
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Probing dusty-plasma/surface interactions with a heat flux microsensor

S. N. Abolmasov, P. A. Cormier, A. Torres Rios, R. Dussart, N. Semmar, A. L. Thomann, and P. Roca i Cabarrocas

Appl. Phys. Lett. 100, 011601 (2012); http://dx.doi.org/10.1063/1.3674290 (3 pages) | Cited 1 time

Online Publication Date: 4 January 2012

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Heat flux microsensor—a thermopile with millisecond response time—was employed for direct measurements of total energy flux to a floated surface in a dusty rf discharge. The measurements were performed in silane-hydrogen plasmas at discharge conditions close to those used for the growth of polymorphous silicon films. At rf power between 10 and 50 W, the measured energy flux was in the range of 20-250 mW/cm2. Due to fast time response, the thermopile was also capable of tracing the dynamics of nanoparticle growth. A significant decrease (about 30%) in the energy flux was observed during the agglomeration phase.
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52.40.Hf Plasma-material interactions; boundary layer effects
52.80.Pi High-frequency and RF discharges
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
07.10.Cm Micromechanical devices and systems
52.27.Lw Dusty or complex plasmas; plasma crystals
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