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Appl. Phys. Lett. 100, 041112 (2012); http://dx.doi.org/10.1063/1.3679659 (3 pages)

Parabolic tapered photonic crystal cavity in silicon

Boris Desiatov, Ilya Goykhman, and Uriel Levy

Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, Israel

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(Received 6 December 2011; accepted 6 January 2012; published online 25 January 2012)

We demonstrate the design, fabrication, transmission spectrum measurement, and near-field characterization of a parabolic tapered one-dimensional photonic crystal cavity in silicon. The results shows a relatively high quality factor (∼43 000), together with a small modal volume of ∼1.1(λ/n)3. Moreover, the design allows repeatable device fabrication, as evident by the similar characteristics obtained for several tens of devices that were fabricated and tested. These demonstrated 1D PhC cavities may be used as a building block in integrated photonic circuits for optical on-chip interconnects and sensing applications.

© 2012 American Institute of Physics

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0003-6951 (print)  
1077-3118 (online)

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