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Appl. Phys. Lett. 100, 041112 (2012); http://dx.doi.org/10.1063/1.3679659 (3 pages)
Parabolic tapered photonic crystal cavity in silicon
(Received 6 December 2011; accepted 6 January 2012; published online 25 January 2012)
© 2012 American Institute of Physics
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KEYWORDS, PACS, and IPC
Keywords
elemental semiconductors, infrared spectra, near-field scanning optical microscopy, optical design techniques, optical fabrication, optical testing, photonic crystals, Q-factor, silicon
PACS
International Patent Classification (IPC)
Measuring microscopes
ARTICLE DATA
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