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Appl. Phys. Lett. 100, 041906 (2012); http://dx.doi.org/10.1063/1.3679611 (3 pages)
Growth sector dependence and mechanism of stress formation in epitaxial diamond growth
(Received 14 October 2011; accepted 9 January 2012; published online 26 January 2012)
© 2012 American Institute of Physics
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KEYWORDS, PACS, and IPC
Keywords
chemical vapour deposition, compressive strength, diamond, dislocation climb, epitaxial growth, epitaxial layers, Raman spectra, stress analysis, tensile strength, X-ray diffraction
PACS
International Patent Classification (IPC)
ARTICLE DATA
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X. Xiao, B. W. Sheldon, Y. Qi, and A. K. Kothari, Appl. Phys. Lett. 92, 131908 (2008)APPLAB000092000013131908000001.
Y. Qi, B. W. Sheldon, H. Guo, X. Xiao, and A. K. Kothari, Phys. Rev. Lett. 102, 056101 (2009).
M. Mermoux, B. Marcus, A. Crisci, A. Tajani, E. Gheeraert, and E. Bustarret, J. Appl. Phys. 97, 043530 (2005)JAPIAU000097000004043530000001.
M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, Appl. Phys. Lett. 78, 192 (2001)APPLAB000078000002000192000001.
S. Gsell, T. Bauer, J. Goldfuß, M. Schreck, and B. Stritzker, Appl. Phys. Lett. 84, 4541 (2004)APPLAB000084000022004541000001.
S. Gsell, M. Fischer, R. Brescia, M. Schreck, P. Huber, F. Bayer, B. Stritzker, and D. G. Schlom, Appl. Phys. Lett. 91, 061501 (2007)APPLAB000091000006061501000001.
M. Schreck, A. Schury, F. Hörmann, H. Roll, and B. Stritzker, J. Appl. Phys. 91, 676 (2002)JAPIAU000091000002000676000001.
X. Jiang, W. J. Zhang, M. Paul, and C.-P. Klages, Appl. Phys. Lett. 68, 1927 (1996)APPLAB000068000014001927000001.
I. Sakaguchi, M. Nishitani-Gamo, K. P. Loh, S. Hishita, H. Haneda, and T. Ando, Appl. Phys. Lett. 73, 2675 (1998)APPLAB000073000018002675000001.
S. A. Stuart, S. Prawer, and P. S. Weiser, Appl. Phys. Lett. 62, 1227 (1993)APPLAB000062000011001227000001.
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