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Applied Physics Letters / Volume 100 / Issue 5 / NANOSCALE SCIENCE AND TECHNOLOGY

Appl. Phys. Lett. 100, 053102 (2012); http://dx.doi.org/10.1063/1.3679614 (5 pages)

High‐temperature annealing of thin Au films on Si: Growth of SiO2 nanowires or Au dendritic nanostructures?

F. Ruffino1,2, L. Romano1,2, G. Pitruzzello1,3, and M. G. Grimaldi1,2

1Dipartimento di Fisica ed Astronomia‐Università di Catania, via S. Sofia 64, 95123 Catania, Italy
2MATIS IMM‐CNR, via S. Sofia 64, 95123 Catania, Italy
3Scuola Superiore di Catania, Via Valdisavoia 9, I‐95123 Catania, Italy

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(Received 7 December 2011; accepted 8 January 2012; published online 30 January 2012)

A simple and low‐cost approach for the large‐scale production of Au nanodendritic structures on Si is presented. Starting from the methodology involving deposition of a Au film on Si and heating the system to high temperatures in an inert ambient containing trace amounts of oxygen for the growth of SiO2 nanowires (NWs), we show that a suppression of the NWs growth and a promotion of the growth of Au nanodendrites occur when fast heating and cooling rates are used. We analyze the nanodendrites formation process considering the kinetics processes at the Au/Si interface in far from thermodynamic equilibrium situation.

© 2012 American Institute of Physics

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KEYWORDS, PACS, and IPC

Keywords

annealing, cooling, dendrites, gold, high-temperature effects, interface roughness, metallic thin films, nanofabrication, nanowires, silicon, silicon compounds

PACS

  • 81.16.Rf

    Micro- and nanoscale pattern formation

  • 81.40.Gh

    Other heat and thermomechanical treatments

  • 61.46.Km

    Structure of nanowires and nanorods (long, free or loosely attached, quantum wires and quantum rods, but not gate-isolated embedded quantum wires)

  • 81.07.Gf

    Nanowires

  • 68.35.Ct

    Interface structure and roughness

  • 68.55.-a

    Thin film structure and morphology

International Patent Classification (IPC)

  • B82B1/00

    Nano-structures

  • B82B3/00

    Manufacture or treatment of nano-structures

  • C21D1/26

    Methods of annealing

  • F25

    Refrigeration or cooling; Combined heating and refrigeration systems; Heat pump systems; Manufacture or storage of ice; Liquefaction or solidification of gases

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3679614

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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