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Appl. Phys. Lett. 100, 053110 (2012); http://dx.doi.org/10.1063/1.3679684 (4 pages)

Self-driving capacitive cantilevers for high-frequency atomic force microscopy

Keith A. Brown, Benjamin H. Yang, and R. M. Westervelt

School of Engineering and Applied Sciences and Department of Physics, Harvard University, Cambridge, Massachusetts 02138, USA

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(Received 7 November 2011; accepted 7 January 2012; published online 31 January 2012)

We demonstrate a simple way to actuate an atomic force microscope cantilever at high frequencies by electrically driving a thin-film capacitor on its surface. Capacitive driving directly actuates the vibrational mode of the cantilever, removing the effects of unwanted mechanical modes present in conventional driving systems and removing the need for a drive piezoelectric. Practical vibration amplitudes are attainable at drive voltages <5 V. We capacitively drive the first mechanical resonance of a tapping mode cantilever (243 kHz) and a high-frequency cantilever (1.5 MHz) with vibration amplitudes in agreement with our model of capacitive driving.

© 2012 American Institute of Physics

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KEYWORDS, PACS, and IPC

PACS

International Patent Classification (IPC)

  • H01G4/00

    Fixed capacitors; Processes of their manufacture

  • H01G4/33

    Thin- or thick-film capacitors

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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