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Appl. Phys. Lett. 100, 061106 (2012); http://dx.doi.org/10.1063/1.3681363 (4 pages)

Electrically driven nanopyramid green light emitting diode

S.-P. Chang1,2, Y.-C. Chen1, J.-K. Huang1, Y.-J. Cheng1,3, J.-R. Chang4, K.-P. Sou1, Y.-T. Kang1, H.-C. Yang2, T.-C. Hsu2, H.-C. Kuo1, and C.-Y. Chang4

1Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 300, Taiwan
2R&D Division, Epistar Co. Ltd., Science-based Industrial Park, Hsinchu 300, Taiwan
3Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan
4Department of Electronic Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 300, Taiwan

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(Received 27 August 2011; accepted 13 January 2012; published online 7 February 2012)

An electrically driven nanopyramid green light emitting diode (LED) was demonstrated. The nanopyramid arrays were fabricated from a GaN substrate by patterned nanopillar etch, pillar side wall passivation, and epitaxial regrowth. Multiple quantum wells were selectively grown on the facets of the nanopyramids. The fabricated LED emits green wavelength under electrical injection. The emission exhibits a less carrier density dependent wavelength shift and higher internal quantum efficiency as compared with a reference c-plane sample at the same wavelength. It shows a promising potential for using nanopyramid in high In content LED applications.

© 2012 American Institute of Physics

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KEYWORDS, PACS, and IPC

PACS

International Patent Classification (IPC)

  • B82B3/00

    Manufacture or treatment of nano-structures

  • C23C16/18

    From metallo-organic compounds

  • C30B23/02

    Epitaxial-layer growth

  • C30B25/00

    Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth

  • C30B25/02

    Epitaxial-layer growth

  • H01L21/02

    Manufacture or treatment of semiconductor devices or of parts thereof

  • H01L21/70

    Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof

  • H01L27/15

    Including semiconductor components with at least one potential-jump barrier or surface barrier, specially adapted for light emission

  • H01L33/00

    Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission, e.g. infra-red; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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