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Applied Physics Letters / Volume 100 / Issue 6 / PHOTONICS AND OPTOELECTRONICS

Appl. Phys. Lett. 100, 061124 (2012); http://dx.doi.org/10.1063/1.3684248 (3 pages)

Mechanically compliant grating reflectors for optomechanics

Utku Kemiktarak1,2, Michael Metcalfe1,2, Mathieu Durand1, and John Lawall1

1National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899, USA
2Joint Quantum Institute, University of Maryland, College Park, Maryland 20742, USA

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(Received 3 November 2011; accepted 21 January 2012; published online 10 February 2012)

We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 × 105 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F = 1200, and used the optical response to probe the mechanical properties of the membrane.

© 2012 American Institute of Physics

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KEYWORDS, PACS, and IPC

Keywords

dielectric materials, diffraction gratings, Fabry-Perot resonators, membranes, optical elements, Q-factor, silicon compounds

PACS

International Patent Classification (IPC)

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3684248

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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