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1 Dec 1981

Volume 39, Issue 11, pp. 855-929

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Laser induced chemical vapor deposition of carbon

G. Leyendecker, D. Bäuerle, P. Geittner, and H. Lydtin

Appl. Phys. Lett. 39, 921 (1981); http://dx.doi.org/10.1063/1.92607 (3 pages) | Cited 31 times

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Initial results on laser‐induced chemical vapor deposition using the visible radiation of an Ar+ laser are presented. Due to the smaller wavelength of Ar+ laser radiation in comparison to the infrared radiation of a CO2 laser used in earlier experiments, much finer patterns could be produced. The influence of laser irradiance on the deposition rate and widths of patterns was investigated.
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81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
68.55.-a Thin film structure and morphology
42.60.-v Laser optical systems: design and operation

Absolute pressure measurements using ZrO2 electrochemical cells

W. A. Fate, Robert E. Hetrick, and W. C. Vassell

Appl. Phys. Lett. 39, 924 (1981); http://dx.doi.org/10.1063/1.92608 (3 pages) | Cited 3 times

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An absolute pressure sensor is reported that uses electrochemical pumping of oxygen. Sensor operation uses the pressure dependence of O2 diffusion in a host gas. The device is unusual because no reference pressure or vacuum is required for absolute measurements. The main features of device operation are in agreement with calculation.
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85.80.-b Thermoelectromagnetic and other devices
66.90.+r Other topics in nonelectronic transport properties of condensed matter (restricted to new topics in section 66)
07.90.+c Other topics in instruments, apparatus, and components common to several branches of physics and astronomy (restricted to new topics in section 07)

Silicide films for archival optical storage

K. N. Tu, K. Y. Ahn, and S. R. Herd

Appl. Phys. Lett. 39, 927 (1981); http://dx.doi.org/10.1063/1.92609 (3 pages) | Cited 9 times

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We demonstrate here that bilayer films consisting of Si and transition metals with a layer thickness of 15–40 nm are promising materials for archival optical storage. They show a large optical reflectivity change before and after silicide formation, have a long lifetime at room temperature, and are nontoxic.
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68.35.-p Solid surfaces and solid-solid interfaces: structure and energetics
79.20.Ds Laser-beam impact phenomena
07.60.-j Optical instruments and equipment
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