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8 Aug 1988

Volume 53, Issue 6, pp. 457-537

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Use of electron beam lithography to selectively decompose metalorganics into patterned thin‐film superconductors

J. V. Mantese, A. B. Catalan, A. H. Hamdi, A. L. Micheli, and K. Studer‐Rabeler

Appl. Phys. Lett. 53, 526 (1988); http://dx.doi.org/10.1063/1.100625 (3 pages) | Cited 16 times

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Fine line superconductors, approximately 5 μm in width and 260 nm thick, were formed from Y‐Ba‐Cu on 〈100〉SrTiO3 by the combined methods of metalorganic deposition and selective area electron beam exposure. The lines were written in metal neodecanoates using an electron beam having a spot size of 0.25 μm and an energy of 25 kV. The dosage of the exposure was 1200 μC/cm2. Unexposed areas were removed with a 30 s xylene wash. A 500 °C pyrolysis in air for 300 s followed by rapid thermal annealing in oxygen produced lines having superconducting onsets above 90 K and zero resistance at 69 K.
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74.78.-w Superconducting films and low-dimensional structures
74.70.-b Superconducting materials other than cuprates
81.15.-z Methods of deposition of films and coatings; film growth and epitaxy
85.40.Hp Lithography, masks and pattern transfer

Photoemission study of the surface electronic structure of Bi‐Ca‐Sr‐Cu‐O superconductors modified by Ne sputtering, Ag deposition, and heat treatment

P. A. P. Lindberg, Z.‐X. Shen, I. Lindau, W. E. Spicer, C. B. Eom, and T. H. Geballe

Appl. Phys. Lett. 53, 529 (1988); http://dx.doi.org/10.1063/1.100626 (3 pages) | Cited 29 times

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Photoelectron spectroscopy has been utilized to study the effect on the electronic structure of the Bi‐Ca‐Sr‐Cu‐O surface of Ne sputtering, deposition of Ag, and annealing in ultrahigh vacuum, aiming at gaining insight into the role of different processing parameters. The results show that all these treatments significantly reduce the valency of Cu in the superconductor, and strongly modify the electronic states in the valence band. In addition, Ne sputtering or annealing in ultrahigh vacuum gives rise to new features in both the O 1s core‐level data and in the valence band. We conclude that the electronic structure of the Bi‐Ca‐Sr‐Cu‐O surface is very sensitive to different methods of preparation.
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73.20.At Surface states, band structure, electron density of states
79.60.-i Photoemission and photoelectron spectra
81.40.Rs Electrical and magnetic properties related to treatment conditions
74.70.-b Superconducting materials other than cuprates

Thin‐film Bi‐Sr‐Ca‐Cu‐O high‐temperature superconductors using pulsed laser evaporation from sintered disks

C. Richard Guarnieri, R. A. Roy, K. L. Saenger, S. A. Shivashankar, D. S. Yee, and J. J. Cuomo

Appl. Phys. Lett. 53, 532 (1988); http://dx.doi.org/10.1063/1.100627 (2 pages) | Cited 28 times

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Films of the high‐temperature superconductor in the Bi‐Sr‐Ca‐Cu‐O system were deposited by pulsed laser evaporation from a ceramic disk. Films deposited onto (100) MgO show x‐ray diffraction patterns characteristic of c‐axis textured Bi2(Sr,Ca,Bi)3Cu2Ox phase following annealing for 10 min at 850 °C in 20% O2‐80% N2. These textured films have zero resistance at 78 K and show resistance drops near 110 K. The effects of the annealing environment on the electrical and structural properties are presented.
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74.78.-w Superconducting films and low-dimensional structures
74.70.-b Superconducting materials other than cuprates
68.55.-a Thin film structure and morphology
81.40.Rs Electrical and magnetic properties related to treatment conditions

Spectroscopic and ion probe measurements of KrF laser ablated Y‐Ba‐Cu‐O bulk samples

P. E. Dyer, R. D. Greenough, A. Issa, and P. H. Key

Appl. Phys. Lett. 53, 534 (1988); http://dx.doi.org/10.1063/1.100628 (3 pages) | Cited 101 times

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The KrF laser ablation of Y‐Ba‐Cu‐O bulk samples has been studied using visible UV spectroscopy and ion probes. Principal luminescent species, expansion velocities, and the extent of ionization in the ablation plume have been determined in this way, providing information on the interaction of relevance to ablation as a film deposition source.
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79.20.Ds Laser-beam impact phenomena
81.15.Jj Ion and electron beam-assisted deposition; ion plating
74.78.-w Superconducting films and low-dimensional structures
74.70.-b Superconducting materials other than cuprates
FREE

Erratum: Single‐crystal x‐ray diffraction study of the InGaAs‐GaAsP/GaAs superlattice system [Appl. Phys. Lett. 52, 1258 (1988)]

B. L. Jiang, F. Shimura, G. A. Rozgonyi, N. Hamaguchi, and S. M. Bedair

Appl. Phys. Lett. 53, 537 (1988); http://dx.doi.org/10.1063/1.100420 (1 page)

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Abstract Unavailable
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68.65.-k Low-dimensional, mesoscopic, nanoscale and other related systems: structure and nonelectronic properties
68.55.-a Thin film structure and morphology
68.55.Ln Defects and impurities: doping, implantation, distribution, concentration, etc.
99.10.Cd Errata
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