Lines of different widths and thicknesses of YBa2Cu3O7−δ were prepared on SrTiO3 and compared for signs of morphological dependence on line dimensions. The lines were prepared on (100) SrTiO3 by electron beam (e‐beam) coevaporation, e‐beam resist lift‐off, and annealing in oxygen to 850 °C. Linewidths ranged from 5 to 0.8 μm, and two film thicknesses, 200 nm (‘‘thin’’) and 500 nm (‘‘thick’’), were prepared. Eddy current measurements showed all samples to be superconducting with transition onset near 95 K. The morphology was found to depend not only on film thickness but also, for finest (≤1 μm) lines, on linewidth. ‘‘Thin’’ lines of all widths showed nearly no a‐type structure, while thick‐film lines showed predominantly a‐type structure on the surface except for the narrowest lines. Narrowest ‘‘thick’’ lines, like ‘‘thin’’ lines, contained mostly c‐type structure. The results for thick fine lines suggest that reduced area growth may offer a practical advantage in achieving c‐type morphology in patterned YBa2Cu3O7−δ for applications.