Thin films of NdBa2Cu3O7−δ(NdBCO) were fabricated on SrTiO3 substrates by an off‐axis rf sputtering. Disk shaped targets of 5 cm in diameter were prepared with stoichiometric composition of NdBCO by sintering at 1273 K in air. The sintered body was single phase and exhibited Tc(R=0)=92 K. The effects of several deposition parameters on the superconducting NdBCO thin films, e.g., gas pressure, substrate temperature, oxygen annealing process, and rf power were studied. The x‐ray diffraction pattern showed the deposited thin films were highly c‐axis oriented without any impurity phase. Thin films with Tc(R=0)=87 K could be obtained reproducibly at optimized conditions. Critical current density (Jc) of the patterned thin film was 106–107 A/cm2 at low temperature. © 1996 American Institute of Physics.