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Appl. Phys. Lett. 71, 1095 (1997); doi:10.1063/1.119737 (3 pages)
Selection of substrate orientation and phosphorus flux to achieve p-type carbon doping of Ga0.5In0.5P by molecular beam epitaxy
(Received 5 May 1997; accepted 24 June 1997)
© 1997 American Institute of Physics
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KEYWORDS and PACS
Keywords
gallium compounds, indium compounds, III-V semiconductors, semiconductor epitaxial layers, molecular beam epitaxial growth, semiconductor growth, semiconductor doping, crystal orientation, surface topography, hole density, carbon, GALLIUM PHOSPHIDES, INDIUM PHOSPHIDES, MOLECULAR BEAM EPITAXY, CRYSTAL DOPING, CARBON ADDITIONS, PHOSPHORUS ADDITIONS, SUBSTRATES
PACS
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III-V semiconductors
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Charge carriers: generation, recombination, lifetime, and trapping
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Defects and impurities: doping, implantation, distribution, concentration, etc.
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III-V and II-VI semiconductors
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III-V semiconductors
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III-V and II-VI semiconductors
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Structure of clean surfaces (and surface reconstruction)
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Charge carriers: generation, recombination, lifetime, trapping, mean free paths
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