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Appl. Phys. Lett. 71, 1095 (1997); doi:10.1063/1.119737 (3 pages)

Selection of substrate orientation and phosphorus flux to achieve p-type carbon doping of Ga0.5In0.5P by molecular beam epitaxy

D. J. Friedman, A. E. Kibbler, and R. Reedy

National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, Colorado 80401

(Received 5 May 1997; accepted 24 June 1997)

We show that the p-type doping of Ga0.5In0.5P grown by solid-source molecular beam epitaxy using CBr4 as a carbon source is very strongly dependent upon the phosphorus flux and upon the substrate misorientation from (100). High densities of A-type steps and low phosphorus flux favor the incorporated carbon acting as a p-type dopant. We demonstrate that with the substrate orientation and phosphorus flux chosen to satisfy these two criteria, doping of C:Ga0.5In0.5P into the mid-1018 holes/cm3 range can be achieved for the as-grown material. © 1997 American Institute of Physics.

© 1997 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 81.05.Ea

    III-V semiconductors

  • 72.20.Jv

    Charge carriers: generation, recombination, lifetime, and trapping

  • 68.55.Ln

    Defects and impurities: doping, implantation, distribution, concentration, etc.

  • 72.80.Ey

    III-V and II-VI semiconductors

  • 73.61.Ey

    III-V semiconductors

  • 61.72.uj

    III-V and II-VI semiconductors

  • 68.35.B-

    Structure of clean surfaces (and surface reconstruction)

  • 73.50.Gr

    Charge carriers: generation, recombination, lifetime, trapping, mean free paths

PUBLICATION DATA

ISSN:

0003-6951 (print)  
1077-3118 (online)

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