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12 Jan 1998

Volume 72, Issue 2, pp. 135-266

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X-ray generation in cryogenic targets irradiated by 1 μm pulse laser

Atsushi Shimoura, Sho Amano, Shuji Miyamoto, and Takayasu Mochizuki

Appl. Phys. Lett. 72, 164 (1998); http://dx.doi.org/10.1063/1.120708 (3 pages) | Cited 20 times

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Soft x-ray spectral radiations from Xe, H2O, and CO2 cryogenic targets irradiated by a 1 μm neodymium doped YAG-slab laser at pulse widths of 12–20 ns and at laser intensities of 5×1010–1012 W/cm2 have been observed. These targets radiate soft x-rays in a wavelength range of 10–13 nm which is useful for projection microlithography. We have found a strong x-ray spectral peak at λ = 10.8 nm with a Xe cryogenic target. The measured x-ray conversion efficiency with the Xe target was 0.8%/sr(λ=10.8±0.27 nm) at a laser intensity of 1×1012 W/cm2. This was ten times or more efficient than that with H2O and CO2 targets. © 1998 American Institute of Physics.
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07.20.Mc Cryogenics; refrigerators, low-temperature detectors, and other low-temperature equipment
07.85.-m X- and γ-ray instruments
42.65.Ky Frequency conversion; harmonic generation, including higher-order harmonic generation

Influence of ambient gas on the temperature and density of laser produced carbon plasma

S. S. Harilal, C. V. Bindhu, V. P. N. Nampoori, and C. P. G. Vallabhan

Appl. Phys. Lett. 72, 167 (1998); http://dx.doi.org/10.1063/1.120602 (3 pages) | Cited 11 times

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The effect of ambient gas on the dynamics of the plasma generated by laser ablation of a carbon target using 1.06 μm radiation from a Q-switched Nd:YAG laser has been investigated using a spectroscopic technique. The emission characteristics of the carbon plasma produced in argon, helium and air atmospheres are found to depend strongly on the nature and pressure of the surrounding gas. It has been observed that hotter and denser plasmas are formed in an argon atmosphere rather than in helium or air as an ambient. © 1998 American Institute of Physics.
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52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
79.20.Ds Laser-beam impact phenomena
52.25.-b Plasma properties
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