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6 Jul 1998

Volume 73, Issue 1, pp. 1-131

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Experimental study of spontaneous electric field generated by a laser plasma

A. V. Kabashin, P. I. Nikitin, W. Marine, and M. Sentis

Appl. Phys. Lett. 73, 25 (1998); http://dx.doi.org/10.1063/1.121711 (3 pages) | Cited 17 times

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We report investigations of a space-time structure of the electric field of laser plasma from a solid target. An ArF excimer laser with an intensity of I ≅ 108 W/cm2 was used to produce the plasma on various targets placed in air at atmospheric pressure. A strong difference in both the amplitude (by more than 1–2 orders of magnitude) and the structure of the electric field for conductive and dielectric targets has been observed. The field distribution for a conductive target was found to correspond to a dipole configuration of charges in the laser plasma, while for the dielectric target a quadrupole configuration was revealed. Possible explanations and applications of the observed effect are discussed. © 1998 American Institute of Physics.
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52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.25.-b Plasma properties
52.70.Ds Electric and magnetic measurements

Spectroscopic evidence of the formation of N–H and N–D complexes in plasma hydrogenated and deuterated ZnTe:N layers

H. Pelletier, A. Lusson, B. Theys, J. Chevallier, and N. Magnéa

Appl. Phys. Lett. 73, 28 (1998); http://dx.doi.org/10.1063/1.121712 (3 pages) | Cited 2 times

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Homoepitaxially grown nitrogen-doped ZnTe layers have been exposed to a hydrogen (deuterium) plasma. After hydrogen (deuterium) diffusion, an infrared absorption band appears at 3346 cm−1 (2489 cm−1). It is assigned to the vibrational stretching mode of the N–H (N–D) bond. It is also shown that the absence of such detectable bands in heteroepitaxially grown ZnTe/CdZnTe layers can be explained by thermal strains originating from the difference between the ZnTe and the CdZnTe thermal expansion coefficients. © 1998 American Institute of Physics.
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78.66.Hf II-VI semiconductors

Determination of the absolute CH3 radical flux emanating from a methane electron cyclotron resonance plasma

P. Pecher and W. Jacob

Appl. Phys. Lett. 73, 31 (1998); http://dx.doi.org/10.1063/1.121713 (3 pages) | Cited 27 times

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Methyl radicals from a methane electron cyclotron resonance plasma are measured quantitatively at the sample position by ionization-threshold mass spectrometry (ITMS). The absolute fluxes are determined by calibrating the CH3 ITMS results with those of methane, taking into account the published energy-dependent cross sections for the ionization of CH3 and CH4, respectively. The measured CH3 radical fluxes are on the order of some 1015 cm−2 s−1, which is in accordance with recent modeling results. © 1998 American Institute of Physics.
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81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
68.55.Nq Composition and phase identification
52.77.Bn Etching and cleaning
52.77.Dq Plasma-based ion implantation and deposition
82.80.Ms Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI)
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