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23 Nov 1998

Volume 73, Issue 21, pp. 3025-3166

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Comment on “An analysis technique for extraction of thin film stresses from x-ray data” [Appl. Phys. Lett. 71, 2949 (1997)]

Conal E. Murray and I. C. Noyan

Appl. Phys. Lett. 73, 3165 (1998); http://dx.doi.org/10.1063/1.122707 (2 pages) | Cited 4 times

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Abstract Unavailable

Show PACS

68.60.Bs	Mechanical and acoustical properties
61.05.cp	X-ray diffraction

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