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17 Aug 1998

Volume 73, Issue 7, pp. 865-1010

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Transverse surface acoustic wave detection by scanning acoustic force microscopy

G. Behme, T. Hesjedal, E. Chilla, and H.-J. Fröhlich

Appl. Phys. Lett. 73, 882 (1998); http://dx.doi.org/10.1063/1.122026 (3 pages) | Cited 12 times

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We present a scanning acoustic force microscope (SAFM) for the study of surface acoustic wave (SAW) phenomena on the submicron lateral scale. Until now, SAWs with in-plane oscillation components could only be studied effectively via nonvanishing out-of-plane oscillation contributions. By operating the microscope in lateral force mode, where both bending and torsion of the cantilever are detected, additional amplitude-dependent signals are found, which are due to the interaction with purely in-plane polarized surface oscillations. To demonstrate the capabilities of this type of SAFM, Love waves were studied on the surface of layers deposited on ST-cut quartz with SAW propagation perpendicular to the crystal X-axis. The phase velocity of the wave as well as the amplitude of a standing wave field was measured and compared to calculated values. © 1998 American Institute of Physics.
Show PACS
68.35.Gy Mechanical properties; surface strains
43.58.Ls Acoustical lenses and microscopes
07.79.Lh Atomic force microscopes
68.37.Ef Scanning tunneling microscopy (including chemistry induced with STM)
68.37.Ps Atomic force microscopy (AFM)
68.37.Rt Magnetic force microscopy (MFM)
68.37.Uv Near-field scanning microscopy and spectroscopy
62.30.+d Mechanical and elastic waves; vibrations
62.65.+k Acoustical properties of solids
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