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5 Apr 1999

Volume 74, Issue 14, pp. 1933-2093

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Measurement of the electron energy distribution function in an argon radio-frequency discharge in the γ mode

C. M. Deegan, J. P. Goss, D. Vender, and M. B. Hopkins

Appl. Phys. Lett. 74, 1969 (1999); http://dx.doi.org/10.1063/1.123716 (3 pages) | Cited 8 times

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The α–γ transition in an argon radio-frequency discharge has been measured using Langmuir probes and a current–voltage monitor. At two pressures, bi-Maxwellian electron energy distribution functions were measured in the γ mode. Increasing the gas pressure results in a decrease in the high-energy component of the electron energy distribution function. A transition region in the current–voltage characteristic is also observed. © 1999 American Institute of Physics.
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52.80.Pi High-frequency and RF discharges
52.70.Ds Electric and magnetic measurements

Role of peripheral vacuum regions in the control of the electron cyclotron resonance plasma uniformity

Yoko Ueda, Hiroshi Muta, and Yoshinobu Kawai

Appl. Phys. Lett. 74, 1972 (1999); http://dx.doi.org/10.1063/1.123717 (3 pages) | Cited 10 times

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Spatial measurements of the ion saturation current density indicate stable vacuum regions in a periphery of electron cyclotron resonance (ECR) plasma. The vacuum regions have a possibility to contribute to plasma uniformity by behaving as a waveguide for the incident electromagnetic waves. Mode conversion of electromagnetic waves with long wavelength to the right circular polarized wave was observed experimentally at a certain radial position. Furthermore, microwave propagation in a partially filled plasma chamber was examined numerically. The simulation indicated that the electromagnetic waves with long wavelengths propagated in a periphery of the plasma were converted into the extraordinary wave or electrostatic waves outside the ECR region and that the power absorption took place at the local regions. Physical considerations toward these results imply the reason why the plasma uniformity is influenced by magnetic field gradient. © 1999 American Institute of Physics.
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52.80.Pi High-frequency and RF discharges
52.40.Db Electromagnetic (nonlaser) radiation interactions with plasma
52.40.Fd Plasma interactions with antennas; plasma-filled waveguides
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