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28 Jun 1999

Volume 74, Issue 26, pp. 3921-4070

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Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid

Hidehiro Nishijima, Satsuki Kamo, Seiji Akita, Yoshikazu Nakayama, Ken I. Hohmura, Shige H. Yoshimura, and Kunio Takeyasu

Appl. Phys. Lett. 74, 4061 (1999); http://dx.doi.org/10.1063/1.123261 (3 pages) | Cited 144 times

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We report a controlled process to make carbon-nanotube tips for scanning probe microscopes. The process consists of three steps: (1) purification and alignment of carbon nanotubes using electrophoresis, (2) transfer of a single aligned nanotube onto a conventional Si tip under the view of a scanning electron microscope, and (3) attachment of the nanotube on the Si tip by carbon deposition. Nanotube tips fabricated using this procedure exhibit strong adhesion and are mechanically robust. Finally, the performance of these tips is demonstrated by imaging the fine structure of twinned deoxyribonucleic acid with tapping-mode atomic force microscopy in air. © 1999 American Institute of Physics.
Show PACS
81.05.ub Fullerenes and related materials
07.79.Lh Atomic force microscopes
87.14.G- Nucleic acids
87.15.B- Structure of biomolecules
87.80.-y Biophysical techniques (research methods)

Resolution of polymethyl methacrylate: Molecular weights of 950 000 vs 50 000

Elizabeth A. Dobisz, Susan L. Brandow, Robert Bass, and Loretta M. Shirey

Appl. Phys. Lett. 74, 4064 (1999); http://dx.doi.org/10.1063/1.123262 (3 pages) | Cited 6 times

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The work examines the resolution and line-to-line resolution of two molecular weights of polymethyl methacrylate (PMMA), developed in 25%–50% solutions of methylisobutyl ketone in isopropanol. Both PMMA’s exhibited similar minimum linewidths of 15–18 nm. Measured linespread functions showed primary Gaussian standard deviations of 11.7 and 28 nm for the 950 and 50 K molecular weight PMMAs, respectively. Developer strength produced ⩽1 nm difference in the width of the linespread function. Atomic force microscope images of latent grating patterns show the same line-to-line resolution for the two undeveloped resists. Developed gratings show the 950 K PMMA to have superior line-to-line resolution. The results are analyzed through integration of the measured linespread functions. © 1999 American Institute of Physics.
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85.40.Hp Lithography, masks and pattern transfer
42.70.Jk Polymers and organics

Independent control of ion energy and flux in plasma-enhanced diamond growth

Kungen Teii

Appl. Phys. Lett. 74, 4067 (1999); http://dx.doi.org/10.1063/1.123263 (3 pages) | Cited 13 times

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Ion energy and flux incident upon a positively biased substrate in an inductively coupled plasma (ICP) have been analyzed during diamond growth at a pressure of 20 mTorr. An electrically floated characteristic of the ICP source allowed a shift up of the plasma potential by the biasing. For the substrate bias (Vb) above 20 V, the ion energy remained constant, while the ion flux was shown to decrease with increasing Vb. The diamond film grown with a high ion flux was composed of well-coalesced large scale islands as compared to that with a low ion flux. The results provide a way to control ion energy and flux independently and its advantage for ion-assisted diamond growth. © 1999 American Institute of Physics.
Show PACS
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
81.05.ub Fullerenes and related materials
81.05.Cy Elemental semiconductors
68.55.-a Thin film structure and morphology
52.77.Bn Etching and cleaning
52.77.Dq Plasma-based ion implantation and deposition
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