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5 Jul 1999

Volume 75, Issue 1, pp. 1-147

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Surface acoustic wave impedance element filters for 5 GHz

S. Lehtonen, J. Koskela, M. M. Salomaa, V. P. Plessky, M. Honkanen, and J. Turunen

Appl. Phys. Lett. 75, 142 (1999); http://dx.doi.org/10.1063/1.124300 (3 pages) | Cited 7 times

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Show Abstract
Surface acoustic wave (SAW) impedance element filter prototypes operating in the 5 GHz range are designed, fabricated, and characterized. The patterning is carried out using direct-writing electron-beam lithography and the lift-off technique. The periodicity p of the resonators in the filters for the 5 GHz regime is on the order of 400 nm. Despite the nonideal finger profile, a low minimum insertion loss of 6.5 dB and a flat passband are measured. Our results suggest that SAW technology itself presents no fundamental physical limitations for its extension into the 5 GHz range. © 1999 American Institute of Physics.
Show PACS
84.30.Vn Filters
85.50.-n Dielectric, ferroelectric, and piezoelectric devices
43.58.Kr Spectrum and frequency analyzers and filters; acoustical and electrical oscillographs; photoacoustic spectrometers; acoustical delay lines and resonators
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