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9 Aug 1999

Volume 75, Issue 6, pp. 745-878

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Dielectric property and microstructure of a porous polymer material with ultralow dielectric constant

Yuhuan Xu, Yi-pin Tsai, K. N. Tu, Bin Zhao, Q.-Z. Liu, Maureen Brongo, George T. T. Sheng, and C. H. Tung

Appl. Phys. Lett. 75, 853 (1999); http://dx.doi.org/10.1063/1.124535 (3 pages) | Cited 31 times

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This letter reports the synthesis and dielectric properties of a porous poly(arylethers) material with an ultralow dielectric constant for interlayer dielectric applications in microelectronics. The porous polymer films were fabricated by a method of organic phase separation and evaporation. A dielectric constant of 1.8 was achieved for a porous film with an estimated porosity of 40%. The characterization of microstucture for the porous film showed numerous nanopores with an average size of 3 nm distributed uniformly throughout the film. © 1999 American Institute of Physics.
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77.84.Jd Polymers; organic compounds
77.22.Ch Permittivity (dielectric function)
61.43.Gt Powders, porous materials
81.05.Rm Porous materials; granular materials
61.41.+e Polymers, elastomers, and plastics
68.55.-a Thin film structure and morphology
77.55.-g Dielectric thin films

Ferroelectricity in thin perovskite films

T. Tybell, C. H. Ahn, and J.-M. Triscone

Appl. Phys. Lett. 75, 856 (1999); http://dx.doi.org/10.1063/1.124536 (3 pages) | Cited 23 times

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We report on the investigation of ferroelectricity in thin tetragonal single-crystalline perovskite films of Pb(Zr0.2Ti0.8)O3 grown by off-axis rf magnetron sputtering. The local ferroelectric properties of atomically smooth films, with thicknesses ranging from a few unit cells to 800 Å, were measured using a combination of electric force microscopy and piezoelectric microscopy. The time dependence of the measured signals reveals a stable ferroelectric polarization in films down to thicknesses of 40 Å. © 1999 American Institute of Physics.
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77.84.Ek Niobates and tantalates
77.84.Cg PZT ceramics and other titanates
77.55.-g Dielectric thin films
77.80.-e Ferroelectricity and antiferroelectricity
68.35.B- Structure of clean surfaces (and surface reconstruction)
77.22.Ej Polarization and depolarization
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