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20 Mar 2000

Volume 76, Issue 12, pp. 1489-1630

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Conical diamond tips realized by a double-molding process for high-resolution profilometry and atomic force microscopy applications

C. Beuret, T. Akiyama, U. Staufer, N. F. de Rooij, P. Niedermann, and W. Hänni

Appl. Phys. Lett. 76, 1621 (2000); http://dx.doi.org/10.1063/1.126115 (3 pages) | Cited 6 times

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Show Abstract
High aspect ratio diamond tips with a small radius of curvature were fabricated by means of a double-molding process and hot-filament chemical vapor deposition of diamond. The tips proved to perfectly reproduce the geometry of anisotropically etched silicon tips, which were used as first mold. The diamond tips were mounted on stubs for contact profilometry imaging as well as transferred to cantilevers for atomic force microscopy measurements. Both profilometry and atomic force microscopy investigations have demonstrated the high application potential of these tips. © 2000 American Institute of Physics.
Show PACS
81.05.ub Fullerenes and related materials
68.37.Ef Scanning tunneling microscopy (including chemistry induced with STM)
68.37.Ps Atomic force microscopy (AFM)
68.37.Rt Magnetic force microscopy (MFM)
68.37.Uv Near-field scanning microscopy and spectroscopy
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
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