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27 Mar 2000

Volume 76, Issue 13, pp. 1641-1784

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Low-temperature preparation and characterization of SrBi2Ta2O9 thin films on (100)-oriented LaNiO3 electrodes

G. D. Hu, I. H. Wilson, J. B. Xu, C. P. Li, and S. P. Wong

Appl. Phys. Lett. 76, 1758 (2000); http://dx.doi.org/10.1063/1.126158 (3 pages) | Cited 23 times

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SrBi2Ta2O9 (SBT) ferroelectric thin films were prepared by the metalorganic decomposition technique at annealing temperatures of 600 and 650 °C on Pt/Ti/SiO2/Si substrates coated by (100)-oriented LaNiO3 (LNO) metal oxide thin films, which were fabricated by the sol–gel technique combined with a layer-by-layer annealing method at 600 °C. A (200)-predominant SBT thin film can be formed on LaNiO3(100)/Pt/Ti/SiO2/Si substrate at 600 °C. The effect of the LNO oxide electrode on the dielectric and ferroelectric properties of SBT thin film annealed at 600 °C was studied. Although the remanent polarization of the (200)-predominant SBT thin film is not as large as expected, the film can be uniformly polarized and imaged using an atomic force microscope in the piezoelectric mode. © 2000 American Institute of Physics.
Show PACS
77.84.Ek Niobates and tantalates
77.84.Cg PZT ceramics and other titanates
77.55.-g Dielectric thin films
81.15.Lm Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids)
77.80.Dj Domain structure; hysteresis
68.55.-a Thin film structure and morphology
61.72.Cc Kinetics of defect formation and annealing
77.22.Ej Polarization and depolarization
77.80.Fm Switching phenomena

Na0.5K0.5NbO3/SiO2/Si thin film varactor

Choong-Rae Cho, Jung-Hyuk Koh, Alex Grishin, Saeed Abadei, and Spartak Gevorgian

Appl. Phys. Lett. 76, 1761 (2000); http://dx.doi.org/10.1063/1.126159 (3 pages) | Cited 34 times

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Perfectly c-axis oriented micrometer thick Na0.5K0.5NbO3(NKN) films have been prepared on a thermally grown ultrathin SiO2 template layer onto a Si(001) wafer by the pulsed laser deposition technique. A x-ray diffraction θ–2θ scan reveals multiple-cell structuring of single phase NKN film along the polar axis, while films grown onto amorphous ceramic (Corning) glass show a mixture of slightly c-axis oriented NKN and pyrochlore phases. This implies a small amount of SiO2 crystallites distributed in an amorphous matrix inherit Si(001) orientation and promotes highly oriented NKN film growth. NKN film dielectric permittivity ε was found to vary from 114.0 to 107.2 in the frequency range 1 kHz–1 MHz, while the resistivity was on the order of 2.6×1010 Ω cm @ 20 kV/cm. The planar interdigital variable reactance device (varactor) based on the NKN/SiO2/Si thin film structure possesses a dissipation factor of 0.8% at 1 MHz and zero bias, electrical tunability of 3.1%, and nA order leakage current at 20 V bias at room temperature. © 2000 American Institute of Physics.
Show PACS
84.32.Tt Capacitors
81.15.Fg Pulsed laser ablation deposition
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