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3 Jan 2000

Volume 76, Issue 1, pp. 1-128

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Breakdown of the high-voltage sheath in metal plasma immersion ion implantation

André Anders

Appl. Phys. Lett. 76, 28 (2000); http://dx.doi.org/10.1063/1.125645 (3 pages) | Cited 11 times

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It is suggested that breakdown of a space-charge sheath obeys similar breakdown laws as known for vacuum breakdown. When metal plasmas of vacuum arcs are used, the sheath between a biased substrate and plasma is very thin and the electric-field strength is very high. Field enhancement (e.g., at sharp edges of the substrate) leads to thermal instability of electron emission centers, followed by dense plasma formation which, in turn, electrically short circuits the sheath (breakdown). Theoretical and experimental evidence for this mechanism is presented. © 2000 American Institute of Physics.
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52.77.Bn Etching and cleaning
52.77.Dq Plasma-based ion implantation and deposition
61.72.up Other materials
61.80.Jh Ion radiation effects
52.40.Hf Plasma-material interactions; boundary layer effects
52.80.Mg Arcs; sparks; lightning; atmospheric electricity
52.80.Vp Discharge in vacuum
52.35.Py Macroinstabilities (hydromagnetic, e.g., kink, fire-hose, mirror, ballooning, tearing, trapped-particle, flute, Rayleigh-Taylor, etc.)

Dynamics of an air breakdown plasma on a solid surface during picosecond laser ablation

Samuel S. Mao, Xianglei Mao, Ralph Greif, and Richard E. Russo

Appl. Phys. Lett. 76, 31 (2000); http://dx.doi.org/10.1063/1.125646 (3 pages) | Cited 25 times

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Using picosecond time-resolved shadowgrams and interferograms, we measured the lateral expansion of an early stage ablation plasma induced by a 1064 nm, 35 ps laser pulse on a copper target. The plasma was found to have an electron density on the order of 1020 cm−3 near the target surface. Prior to the expanding material vapor plume, this high density plasma originates from the breakdown of air, assisted by laser-induced electron emission from the target surface. The longitudinal expansion of the plasma was suppressed due to the development of a strong space-charge region. At postpulse times, the relation r ∼ t1/2 was found for the temporal lateral expansion of the radius of the plasma. Measurements of energy absorption by the plasma provide an interpretation for the experimentally measured reduction in ablation efficiency as the laser fluence increases beyond approximately 100 J/cm2. © 2000 American Institute of Physics.
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79.20.Ds Laser-beam impact phenomena
52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
06.60.Jn High-speed techniques (microsecond to femtosecond)

Prepulse-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source

P. Dunne, G. O’Sullivan, and D. O’Reilly

Appl. Phys. Lett. 76, 34 (2000); http://dx.doi.org/10.1063/1.125647 (3 pages) | Cited 11 times

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Soft x-ray emission from 170 ps laser-produced plasmas formed on cerium-doped borosilicate glasses has been recorded in the 7–17 nm region using a 2 m grazing incidence vacuum spectrograph. Broadband spectra have been recorded on photographic plates, while intensity comparisons have been made using an absolutely calibrated, extreme ultraviolet sensitive photodiode. The use of a laser prepulse to prime the target has been seen to enhance the emission with the maximum flux produced at an interpulse delay of 5.1 ns. The peak conversion efficiency is found to be 4.8%±1.5% into 3% bandwidth, centered at 8.8 nm. In addition, the level of debris emitted by the target is greatly reduced by comparison with solid metallic targets. © 2000 American Institute of Physics.
Show PACS
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
79.20.Ds Laser-beam impact phenomena
07.85.Fv X- and γ-ray sources, mirrors, gratings, and detectors
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