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31 Jan 2000

Volume 76, Issue 5, pp. 523-656

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Vacuum emission and breakdown characteristics of a planar He–Xe microdischarge

Olivier B. Postel and Mark A. Cappelli

Appl. Phys. Lett. 76, 544 (2000); http://dx.doi.org/10.1063/1.125813 (3 pages) | Cited 9 times

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Vacuum emission, breakdown, and current–voltage characteristics of a large surface area-to-volume ratio planar dc microdischarge have been measured for different He–Xe mixtures in the range of 10%–100% Xe and pressures in the range of 60–500 Torr. The electrical measurements show that the Paschen breakdown curves and the current–voltage characteristics are primarily controlled by the xenon concentration in the mixture. A study of the vacuum ultraviolet emission of xenon atoms at 147 nm and of xenon dimers at 150 nm normalized to the discharge power reveals the presence of local maxima in the emitted intensity as a function of discharge pressure and xenon concentration, indicative of complex excited-state atomic and excimer kinetic processes. © 2000 American Institute of Physics.
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52.80.Hc Glow; corona
52.25.Os Emission, absorption, and scattering of electromagnetic radiation

Electron temperature control by varying size of slits made in a grid

Kohgi Kato, Tetsuji Shimizu, Satoru Iizuka, and Noriyoshi Sato

Appl. Phys. Lett. 76, 547 (2000); http://dx.doi.org/10.1063/1.125814 (3 pages) | Cited 18 times

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Electron temperature is controlled by varying the length of slits made in a grid immersed in a weakly ionized discharge plasma. The grid, which is kept at floating potential, has six slits in this experiment. With a decrease in the slit length from 6 to 0 cm, the electron temperature decreases from 2.1 to 0.09 eV, being accompanied by an electron-density increase from 0.32×109 to 1.53×109 cm−3 at argon gas pressure of 1.5 mTorr. This method of electron–temperature control is applicable to reactive plasmas in which grids are often covered by insulators. © 2000 American Institute of Physics.
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52.25.Jm Ionization of plasmas
82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)
52.80.-s Electric discharges
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