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18 Sep 2000

Volume 77, Issue 12, pp. 1741-1913

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Influence of electrode-size effects on plasma sheath expansion

Han S. Uhm, Gon H. Kim, Young W. Kim, Gun. W. Kim, Seung H. Han, and Mun P. Hong

Appl. Phys. Lett. 77, 1780 (2000); http://dx.doi.org/10.1063/1.1311318 (3 pages)

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Influence of the electrode-size effects on plasma sheath expansion is investigated for a negative voltage at the cathode with maximum amplitude of V0, assuming that the cathode is a thin, flat, conducting, circular disk of radius R. It is shown that propagation of the sheath front is proportional to the one-third power of the combination, 2V0R/π. Experimental measurements have been carried out to verify theoretical predictions. The experimental data agree remarkably well with theoretical results in every aspect. © 2000 American Institute of Physics.
Show PACS
52.40.Hf Plasma-material interactions; boundary layer effects
52.77.Bn Etching and cleaning
52.77.Dq Plasma-based ion implantation and deposition
52.65.-y Plasma simulation
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