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Applied Physics Letters / Volume 77 / Issue 26 / INTERDISCIPLINARY AND GENERAL PHYSICS

Appl. Phys. Lett. 77, 4425 (2000); http://dx.doi.org/10.1063/1.1332103 (3 pages)

Investigating material and functional properties of static random access memories using cantilevered glass multiple-wire force-sensing thermal probes

Rimma Dekhter1, Edward Khachatryan1, Yuri Kokotov1, Aaron Lewis1, Sophia Kokotov2, Galina Fish2, Yefim Shambrot2, and Klony Lieberman2

1Division of Applied Physics, The Hadassah Laser Center, Department of Ophthalmology and The Neural Computation Center, The Hebrew University of Jerusalem
2Nanonics Imaging Limited, Jerusalem, Israel

(Received 17 July 2000; accepted 13 October 2000)

A double-wire cantilevered glass probe has been produced for scanned probe microthermal, resistivity, and topographic measurements. The structure has many potentially unique properties for scanned probe microscopy and other nanotechnological measurements. In this letter, a double Pt wire probe was fused at the tip and applied to thermal resistive measurements. The probe operation is based on the linear dependence of Pt resistance on temperature. Most microscopic structures are composed of a variety of materials. In the present study, the features of a static random access memory chip are investigated. Such memory chips are composed of materials such as dielectrics, metals, and semiconductors. We demonstrate that these samples, which are prepared using a chemical–mechanical polishing procedure and have essentially no surface topography, can be inspected using the thermal conductivity, resistivity, and topographic sensitivity of these probes. © 2000 American Institute of Physics.

© 2000 American Institute of Physics

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KEYWORDS and PACS

Keywords

SRAM chips, integrated circuit measurement, thermal conductivity measurement, thermal resistance measurement, scanning probe microscopy, surface topography measurement, inspection, thermocouples, force sensors

PACS

  • 84.30.Sk

    Pulse and digital circuits

  • 85.40.Qx

    Microcircuit quality, noise, performance, and failure analysis

  • 07.79.Lh

    Atomic force microscopes

  • 07.07.Df

    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

  • 07.20.-n

    Thermal instruments and apparatus

  • 06.30.Bp

    Spatial dimensions (e.g., position, lengths, volume, angles, and displacements)

  • 07.10.Pz

    Instruments for strain, force, and torque

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.1332103

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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    References

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