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17 Jul 2000

Volume 77, Issue 3, pp. 313-459

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Mechanical resonant immunospecific biological detector

B. Ilic, D. Czaplewski, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Batt

Appl. Phys. Lett. 77, 450 (2000); http://dx.doi.org/10.1063/1.127006 (3 pages) | Cited 176 times

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Show Abstract
We have demonstrated high-sensitivity detection of bacteria using an array of bulk micromachined resonant cantilevers. The biological sensor is a micromechanical oscillator that consists of an array of silicon-nitride cantilevers with an immobilized antibody layer on the surface of the resonator. Measured resonant frequency shift as a function of the additional cell loading was observed and correlated to the mass of the specifically bound Escherichia coli O157:H7 cells. Deposition and subsequent detection of E. coli cells was achieved under ambient conditions. © 2000 American Institute of Physics.
Show PACS
87.85.Va Micromachining
87.85.Ng Biological signal processing
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