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7 Aug 2000

Volume 77, Issue 6, pp. 767-915

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Focused nanoparticle-beam deposition of patterned microstructures

F. Di Fonzo, A. Gidwani, M. H. Fan, D. Neumann, D. I. Iordanoglou, J. V. R. Heberlein, P. H. McMurry, S. L. Girshick, N. Tymiak, W. W. Gerberich, and N. P. Rao

Appl. Phys. Lett. 77, 910 (2000); http://dx.doi.org/10.1063/1.1306638 (3 pages) | Cited 44 times

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A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited. © 2000 American Institute of Physics.
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81.07.-b Nanoscale materials and structures: fabrication and characterization
81.16.-c Methods of micro- and nanofabrication and processing
85.35.-p Nanoelectronic devices
52.77.Bn Etching and cleaning
52.77.Dq Plasma-based ion implantation and deposition
41.85.Lc Particle beam focusing and bending magnets, wiggler magnets, and quadrupoles
61.46.-w Structure of nanoscale materials
07.10.Cm Micromechanical devices and systems

Imaging of charge transport in polycrystalline diamond using ion-beam-induced charge microscopy

P. J. Sellin, M. B. H. Breese, A. P. Knights, L. C. Alves, R. S. Sussmann, and A. J. Whitehead

Appl. Phys. Lett. 77, 913 (2000); http://dx.doi.org/10.1063/1.1306259 (3 pages) | Cited 12 times

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Studies have been made using a 1 μm spatial resolution ion-beam-induced charge (IBIC) technique of the charge transport distribution in polycrystalline diamond produced by chemical vapor deposition. The devices tested used a coplanar electrode structure fabricated only on the growth side of the diamond film, and were predominantly sensitive to charge transport close to the growth surface of the diamond film where the diamond crystallites are largest. Irradiation with 5.48 MeV alpha particles gave a pulse height spectrum with a broad full energy peak and a mean charge collection efficiency of 15%. IBIC images obtained using microfocus proton and alpha particle beams showed spatially resolved regions of high charge collection efficiency correlating to individual diamond crystallites with a typical width of 20 μm, as observed by secondary electron microscopy. © 2000 American Institute of Physics.
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73.61.Cw Elemental semiconductors
07.78.+s Electron, positron, and ion microscopes; electron diffractometers
29.40.Wk Solid-state detectors
61.80.Jh Ion radiation effects
61.82.Fk Semiconductors
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
84.37.+q Measurements in electric variables (including voltage, current, resistance, capacitance, inductance, impedance, and admittance, etc.)
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