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21 Aug 2000

Volume 77, Issue 8, pp. 1071-1232

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Negative ion formation in the scattering of CF3+ from graphite

M. A. Gleeson, M. Kropholler, and A. W. Kleyn

Appl. Phys. Lett. 77, 1096 (2000); http://dx.doi.org/10.1063/1.1289808 (3 pages) | Cited 2 times

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Show Abstract
The scattering of CF3+ from highly oriented pyrolytic graphite results in the formation of CF3−. Comparison is made with CF3+ scattering from a metal and from an insulator surface, which do not yield negative molecular ions. The outcome of the charge transfer processes that occur as CF3+ approaches a surface is critically dependent on the electronic properties of that surface. The ability to produce a stable negative ion close to a surface may be an important factor in the etching efficiency of the CF3 molecule. © 2000 American Institute of Physics.
Show PACS
79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces
34.35.+a Interactions of atoms and molecules with surfaces
81.65.Cf Surface cleaning, etching, patterning
34.70.+e Charge transfer
73.20.At Surface states, band structure, electron density of states
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