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2 Apr 2001

Volume 78, Issue 14, pp. 1961-2084

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Epitaxial growth of Pb(Zr0.2Ti0.8)O3 on Si and its nanoscale piezoelectric properties

A. Lin, X. Hong, V. Wood, A. A. Verevkin, C. H. Ahn, R. A. McKee, F. J. Walker, and E. D. Specht

Appl. Phys. Lett. 78, 2034 (2001); http://dx.doi.org/10.1063/1.1358848 (3 pages) | Cited 29 times

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We have demonstrated a route to epitaxial Pb(Zr0.2Ti0.8)O3 on (001) Si that exhibits a uniform piezoelectric response down to nanoscale levels through the utilization of an insulating, single-crystalline SrTiO3 transition layer. These structures, which were grown by a combination of molecular-beam epitaxy and off-axis magnetron sputtering, have a surface roughness of <5 Å, with piezoelectric microscopy measurements revealing a piezoelectric coefficient of ∼50 pm/V that is switchable down to sub-100-nm dimensions. © 2001 American Institute of Physics.
Show PACS
77.55.-g Dielectric thin films
77.65.-j Piezoelectricity and electromechanical effects
77.84.Ek Niobates and tantalates
77.84.Cg PZT ceramics and other titanates
81.15.Hi Molecular, atomic, ion, and chemical beam epitaxy
68.35.B- Structure of clean surfaces (and surface reconstruction)
81.15.Cd Deposition by sputtering

Origin and control of the lead-enriched near-surface region of (Pb, La)TiO3

E. Vasco, O. Böhme, E. Román, and C. Zaldo

Appl. Phys. Lett. 78, 2037 (2001); http://dx.doi.org/10.1063/1.1359484 (3 pages) | Cited 7 times

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The chemical composition, structure and extension of the Pb-enriched nonferroelectric near-surface region of stoichiometric (Pb, La)TiO3 ferroelectric films was characterized by x-ray diffraction, Rutherford backscattering spectroscopy and x-ray photoemission spectroscopy. Its origin as a result of the Pb excess segregation from the growing (Pb, La)TiO3 bulk and subsequent oxidation was revealed. A postdeposition procedure to control its composition and thereby its properties was provided. Thus, a decrease of the near-surface Pb excess of about 75% was achieved. © 2001 American Institute of Physics.
Show PACS
77.84.Ek Niobates and tantalates
77.84.Cg PZT ceramics and other titanates
68.35.Dv Composition, segregation; defects and impurities
77.55.-g Dielectric thin films
68.37.Xy Scanning Auger microscopy, photoelectron microscopy
79.60.Dp Adsorbed layers and thin films
68.35.B- Structure of clean surfaces (and surface reconstruction)
68.49.Sf Ion scattering from surfaces (charge transfer, sputtering, SIMS)
82.80.Yc Rutherford backscattering (RBS), and other methods of chemical analysis
81.15.Fg Pulsed laser ablation deposition
82.80.Pv Electron spectroscopy (X-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)

Improvements in electrical properties of hydrogen-treated SrBi2Ta2O9 capacitors with chemical vapor deposited Pt top electrode

Eun-Suck Choi, Soon-Gil Yoon, and Won-Jae Lee

Appl. Phys. Lett. 78, 2040 (2001); http://dx.doi.org/10.1063/1.1347015 (3 pages)

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The ferroelectric property and leakage current of metalorganic chemical vapor deposition (MOCVD)-Pt/SrBi2Ta2O9 (SBT)/Pt and dc-sputtered Pt/SBT/Pt capacitors are evaluated with the microstructures of Pt top electrodes before and after hydrogen forming gas anneal. The SBT films with MOCVD-Pt top electrodes of large grain size and dense structure show a surprising decrease of leakage current density and still exhibit ferroelectric properties after hydrogen forming. On the other hand, SBT films with dc-sputtered Pt top electrodes of small grain size show an increase of leakage current density and then polarization switching properties cannot be measured due to fairly high leakage current. The microstructures of Pt top electrodes play an important role in improving the ferroelectric and leakage current characteristics after forming gas anneal. MOCVD-Pt top electrodes can prevent the complete loss of ferroelectricity and improve the leakage current properties during forming gas treatment. © 2001 American Institute of Physics.
Show PACS
84.32.Tt Capacitors
85.50.-n Dielectric, ferroelectric, and piezoelectric devices
77.55.-g Dielectric thin films
77.84.Ek Niobates and tantalates
77.84.Cg PZT ceramics and other titanates
77.22.Ej Polarization and depolarization
81.65.Ps Polishing, grinding, surface finishing
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