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12 Feb 2001

Volume 78, Issue 7, pp. 853-1016

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Room-temperature copper etching based on a plasma–copper reaction

Yue Kuo and Sangheon Lee

Appl. Phys. Lett. 78, 1002 (2001); http://dx.doi.org/10.1063/1.1347388 (3 pages) | Cited 12 times

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A promising room-temperature copper etching process is described. The copper thin film can be etched into a vertical profile at a high rate using a parallel-plate reactor under mild conditions. The key factor for the success of this process is a copper swelling phenomenon from the plasma–copper reaction. The reaction product has been identified as a crystalline copper chloride. Key parameters that influence the reaction process and the final copper profile have been studied. In addition to the plasma phase chemistry, ion bombardment plays a critical role in the process. Although results reported in this letter are based on the chlorine plasma, similar results can be obtained with other halogen gases. This process is potentially important to the fabrication of advanced microelectronic, storage, display, and optical devices. © 2001 American Institute of Physics.
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52.77.Bn Etching and cleaning
81.65.Cf Surface cleaning, etching, patterning

Magnetic-field measurements of current-carrying devices by force-sensitive magnetic-force microscopy with potential correction

Tony Alvarez, Sergei V. Kalinin, and Dawn A. Bonnell

Appl. Phys. Lett. 78, 1005 (2001); http://dx.doi.org/10.1063/1.1345818 (3 pages) | Cited 6 times

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A scanning probe technique for current-carrying device imaging is proposed that combines magnetic-force microscopy with surface-potential nulling measurements. The device is ac biased at an off-resonant frequency and the current-induced magnetic field results in cantilever deflection which is detected by a lock-in amplifier. An ac bias at the resonant frequency is simultaneously applied to the tip and conventional scanning surface-potential microscopy feedback is used to match the tip and surface potentials. This multiple-modulation technique allows electrostatic and magnetic interactions to be distinguished and surface-potential and magnetic-force images to be collected simultaneously. The technique, which is referred to as potential-correction magnetic-force microscopy, produces force rather than force-gradient images as in conventional magnetic-force microscopy. Further prospects for potential-sensitive magnetic-force imaging are discussed. © 2001 American Institute of Physics.
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07.55.Ge Magnetometers for magnetic field measurements
07.79.Pk Magnetic force microscopes

Electronically controlled microwave band gap filter structures

Michael J. Hill, Richard W. Ziolkowski, and John Papapolymerou

Appl. Phys. Lett. 78, 1008 (2001); http://dx.doi.org/10.1063/1.1346629 (3 pages) | Cited 1 time

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Microwave band gap structures (MBG) utilizing fixed defects have received much interest because of their ability to operate as narrow band filters. With the recent interest in reconfigurable wireless devices, the need for electronically controllable narrow band filters is on the rise. By altering the defects in an MBG crystal, the transmission properties of the crystal can be changed. Using this concept, two controllable defect structures have been studied. Microwave band gap crystals utilizing single and dual p–i–n diode defect structures have been simulated, fabricated, and tested. Through the control of the p–i–n diode bias current, the transmission effects caused by the crystal defects can be altered. Experiments demonstrating contrasts of more than 30 dB between the diode-on and diode-off states are presented along with the corresponding finite difference time domain simulation results. © 2001 American Institute of Physics.
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84.30.Vn Filters
42.70.Qs Photonic bandgap materials
84.40.Az Waveguides, transmission lines, striplines
02.70.Bf Finite-difference methods

Contrast mechanisms for neutron radiography

P. J. McMahon, B. E. Allman, K. A. Nugent, D. L. Jacobson, M. Arif, and S. A. Werner

Appl. Phys. Lett. 78, 1011 (2001); http://dx.doi.org/10.1063/1.1347387 (3 pages) | Cited 9 times

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The use of thermal neutrons in contact radiography and tomography [Schlenker and Baruchel, Physica B 137, 309 (1986)] provides a powerful nondestructive analysis technique for materials that are difficult to study with x rays [Kirz et al., Quart. Rev. Biophys. 28, 33 (1995)]. Since x rays are strongly absorbed by the heavier elements and neutrons are preferentially scattered by light elements, neutron radiography is well suited to the visualization of light elements in the interior of metallic objects. In this letter, we demonstrate neutron radiography using a number of different contrast mechanisms. We find we are able to obtain radiographs showing features hitherto unobservable. © 2001 American Institute of Physics.
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81.70.-q Methods of materials testing and analysis

Alloys by precision electrodeposition

I. Kazeminezhad, H. J. Blythe, and W. Schwarzacher

Appl. Phys. Lett. 78, 1014 (2001); http://dx.doi.org/10.1063/1.1349868 (3 pages) | Cited 8 times

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We show that a Cu–Ni alloy film of arbitrary composition may be grown by electrodepositing well-defined submonolayer quantities of Cu and Ni in alternation. Active computer control of the deposition process is used to compensate for undesired electrochemical processes, such as partial redissolution of the Ni. Magnetic measurements were used to characterize alloy homogeneity. With this electrodeposition method it is possible to tailor the composition profile of a film with subnanometer precision. As an example, Cu0.19Ni0.81/Cu0.79Ni0.21 alloy/alloy multilayers were fabricated which gave prominent satellite peaks in high angle x-ray diffraction patterns. © 2001 American Institute of Physics.
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81.05.Bx Metals, semimetals, and alloys
81.15.Pq Electrodeposition, electroplating
82.45.Qr Electrodeposition and electrodissolution
68.65.Ac Multilayers
75.70.Ak Magnetic properties of monolayers and thin films
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