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10 Sep 2001

Volume 79, Issue 11, pp. 1587-1734

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Electron temperature analysis of two-gas-species inductively coupled plasma

K. H. Bai, H. Y. Chang, and H. S. Uhm

Appl. Phys. Lett. 79, 1596 (2001); http://dx.doi.org/10.1063/1.1404135 (3 pages) | Cited 15 times

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The electron energy distribution functions and electron temperatures are measured in Ar/He and Ar/Xe inductively coupled plasma with various mixing ratios. The electron temperature does not change linearly with the mixing ratios; instead it increases abruptly near PHe/PAr+He = 1 and decreases rapidly near PXe/PAr+Xe = 0. A simple model using a two-ion-species fluid model is suggested to explain the electron temperature variations, and it agrees well with the experimental results. © 2001 American Institute of Physics.
Show PACS
52.27.Cm Multicomponent and negative-ion plasmas
52.70.Ds Electric and magnetic measurements
52.25.-b Plasma properties
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