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29 Oct 2001

Volume 79, Issue 18, pp. 2865-3001

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Emission uniformity and emission area of explosive field emission cathodes

D. Shiffler, M. Ruebush, M. LaCour, K. Golby, R. Umstattd, M. C. Clark, J. Luginsland, D. Zagar, and M. Sena

Appl. Phys. Lett. 79, 2871 (2001); http://dx.doi.org/10.1063/1.1415408 (3 pages) | Cited 24 times

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Explosive field emission cathodes have been used extensively in high power microwave tubes. These cathodes emit electrons without the use of cathode heaters. Recently, some theoretical and simulation work has been performed to gain further understanding of the physics of these cathodes. The purpose of this letter is to provide the experimental background and justification for the theoretical work. The general idea of how explosive field emission cathodes operate is that plasma is rapidly formed, which provides the sea of electrons for space charge limited flow. However, recent theoretical and experimental work suggests edge effects, rather than plasma formation across the entire emission area, can also provide the same effect. In this letter we review three types of cathodes which have been tested. We provide optical data on the cathode emission uniformity as well as the electrical data for the same devices. In particular, we find that a large percentage of the cathode can fail to take part in the emission process and yet the voltage and current can appear identical from the case in which the entire cathode contributes electrons to the emission process. © 2001 American Institute of Physics.
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79.70.+q Field emission, ionization, evaporation, and desorption
85.45.-w Vacuum microelectronics

Investigation of electronegativity in a radio-frequency Xe/SF6 inductively coupled plasma using a Langmuir probe

T. Kimura and K. Ohe

Appl. Phys. Lett. 79, 2874 (2001); http://dx.doi.org/10.1063/1.1414297 (3 pages) | Cited 5 times

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The ratio of negative ion to electron densities (electronegativity) has been investigated using a Langmuir probe technique in a radio-frequency Xe/SF6 inductively coupled plasma, where the electron density is in the order of 1016 m−3 and the electron and negative ion temperatures are about 3.5–5 and 0.4 eV, respectively, which are weakly dependent on SF6 content and power injected into plasma. The electronegativity, which is between 5 and 10, does not strongly depend on SF6 content, while it decreases gradually with the increase of electron density. © 2001 American Institute of Physics.
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52.25.-b Plasma properties
52.70.Ds Electric and magnetic measurements
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