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30 Jul 2001

Volume 79, Issue 5, pp. 557-700

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Autoparametric optical drive for micromechanical oscillators

M. Zalalutdinov, A. Zehnder, A. Olkhovets, S. Turner, L. Sekaric, B. Ilic, D. Czaplewski, J. M. Parpia, and H. G. Craighead

Appl. Phys. Lett. 79, 695 (2001); http://dx.doi.org/10.1063/1.1388869 (3 pages) | Cited 34 times

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Show Abstract
Self-generated vibration of a disk-shaped, single-crystal silicon micromechanical oscillator was observed when the power of a continuous wave laser, focused on the periphery of the disk exceeded a threshold of a few hundred μW. With the laser power set to just below the self-generation threshold, the quality factor for driven oscillations increases by an order of magnitude from Q = 10 000 to Qenh = 110 000. Laser heating-induced thermal stress modulates the effective spring constant via the motion of the disk within the interference pattern of incident and reflected laser beams and provides a mechanism for parametric amplification and self-excitation. Light sources of different wavelengths facilitate both amplification and damping. © 2001 American Institute of Physics.
Show PACS
07.10.Cm Micromechanical devices and systems
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
42.65.Yj Optical parametric oscillators and amplifiers
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