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11 Mar 2002

Volume 80, Issue 10, pp. 1683-1849

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Correlation between plasma expansion dynamics and gold-thin film structure during pulsed-laser deposition

Eric Irissou, Boris Le Drogoff, Mohamed Chaker, and Daniel Guay

Appl. Phys. Lett. 80, 1716 (2002); http://dx.doi.org/10.1063/1.1458534 (3 pages) | Cited 23 times

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Pulsed-laser deposition of Au thin films has been achieved by ablating a gold target with a KrF excimer Laser in various conditions of ambient Ar gas pressure (from 10−5 to 4 Torr) and target-to-substrate distance (from 1.0 to 11 cm). The dynamics of the plasma plume were measured in the same conditions. Highly oriented Au (111) thin films are obtained for pressure-distance deposition conditions such that the neutral Au species have a typical velocity larger than 2 km s−1, while a polycrystalline powder is obtained when the typical velocity is smaller than 0.8 km s−1. © 2002 American Institute of Physics.
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68.55.-a Thin film structure and morphology
81.15.Fg Pulsed laser ablation deposition
52.70.Kz Optical (ultraviolet, visible, infrared) measurements

Application of hollow channel between sustain electrodes to improve discharge characteristics in alternating current plasma display panels

Seung-Hyun Son, Yong-Suk Park, Seong-Chan Bae, and Sie-Young Choi

Appl. Phys. Lett. 80, 1719 (2002); http://dx.doi.org/10.1063/1.1458527 (3 pages) | Cited 9 times

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A front-panel structure with a hollow channel between sustain electrodes for an alternating current plasma display panel is proposed to achieve a low breakdown voltage and short discharge time lag due to the strong electric field in the hollow channel. When compared with a conventional structure, the structure with a hollow channel produced a 15% firing voltage improvement, 8% minimum sustaining voltage improvement at a neon gas pressure of 150 Torr, and 8% discharge time lag improvement at a sustaining voltage of 270 V. © 2002 American Institute of Physics.
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85.60.Pg Display systems
52.75.-d Plasma devices

Radial structure of a low-frequency atmospheric-pressure glow discharge in helium

L. Mangolini, K. Orlov, U. Kortshagen, J. Heberlein, and U. Kogelschatz

Appl. Phys. Lett. 80, 1722 (2002); http://dx.doi.org/10.1063/1.1458684 (3 pages) | Cited 67 times

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The spatial structure of a low-frequency atmospheric-pressure glow discharge was studied experimentally. The radial current distribution and discharge light emission were simultaneously measured at different phases during the ac voltage cycle. The glow discharge is formed by a radially propagating ionization wave. We also observed discharge regimes with several current pulses per half cycle corresponding to the successive, spatially separated breakdowns. © 2002 American Institute of Physics.
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52.80.Hc Glow; corona

Heating-mode transition in the capacitive mode of inductively coupled plasmas

ChinWook Chung and Hong-Young Chang

Appl. Phys. Lett. 80, 1725 (2002); http://dx.doi.org/10.1063/1.1456263 (3 pages) | Cited 21 times

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The evolution of the electron energy distribution function (EEDF) against pressure is investigated in the capacitive mode of inductively coupled plasma (ICP). A significant change in the EEDFs is observed: a bi-Maxwellian EEDF at low pressure ( ⩽ 10 mTorr) evolves into a Druyvestein-like EEDF at high pressure ( ≥ 50 mTorr) in the capacitive mode (low-density mode) while the EEDFs in the inductive mode (high-density mode) does not evolve like in the capacitive mode due to high electron–electron collisions. This EEDF transition in the capacitive mode of ICP is similar to that in the capacitive coupled plasma (CCP) reported in literature [V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996(1990)] as pressure increases. This observation directly shows that the electron heating mechanism of the capacitive mode in the ICP is the same as that in the CCP, as expected. © 2002 American Institute of Physics.
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52.50.Qt Plasma heating by radio-frequency fields; ICR, ICP, helicons
52.20.Fs Electron collisions
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