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8 Apr 2002

Volume 80, Issue 14, pp. 2433-2611

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Ratchet device with broken friction symmetry

Bengt Nordén, Yaroslav Zolotaryuk, Peter L. Christiansen, and Alexander V. Zolotaryuk

Appl. Phys. Lett. 80, 2601 (2002); http://dx.doi.org/10.1063/1.1468900 (3 pages) | Cited 3 times

Online Publication Date: 2 April 2002

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An experimental setup (gadget) has been made for demonstration of a ratchet mechanism induced by broken symmetry of a dependence of dry friction on external forcing. This gadget converts longitudinal oscillating or fluctuating motion into a unidirectional rotation, the direction of which is in accordance with given theoretical arguments. Despite the setup being three dimensional, the ratchet rotary motion is proved to be described by one simple dynamic equation. This kind of motion is a result of the interplay of friction and inertia. © 2002 American Institute of Physics.
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07.10.-h Mechanical instruments and equipment
46.55.+d Tribology and mechanical contacts
05.40.Jc Brownian motion
45.40.-f Dynamics and kinematics of rigid bodies

Nucleation of copper on TiN and SiO2 from the reaction of hexafluoroacetylacetonate copper(I) trimethylvinylsilane

P. F. Ma, T. W. Schroeder, and J. R. Engstrom

Appl. Phys. Lett. 80, 2604 (2002); http://dx.doi.org/10.1063/1.1469687 (3 pages) | Cited 6 times

Online Publication Date: 2 April 2002

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The nucleation of copper on TiN and SiO2 surfaces has been investigated using a collimated molecular beam of hexafluroacetylacetonate copper(I) trimethylvinylsilane in ultrahigh vacuum. The Cu thin film precursor was delivered using a bubbler with H2 as the carrier gas and the substrate temperature was varied from 150 to 260 °C. Ex situ analysis of thin film morphology and microstructure has been conducted using scanning electron microscopy. On SiO2 surfaces the Cu nuclei density reaches a maximum near 5×1010 cm−2, nearly independent of substrate temperature. In contrast, on TiN surfaces the maximum nuclei density is strongly dependent on temperature, varying nearly two orders of magnitude from 150 to 260 °C. On TiN the nucleation process is described well by established kinetic models where a maximum in nuclei density (Nmax) is predicted with respect to the time, and where this quantity exhibits an Arrhenius dependence on substrate temperature. © 2002 American Institute of Physics.
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68.55.A- Nucleation and growth
68.55.-a Thin film structure and morphology
81.15.Hi Molecular, atomic, ion, and chemical beam epitaxy
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
85.40.Ls Metallization, contacts, interconnects; device isolation
85.40.Sz Deposition technology
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)

Determining the profile of textured membranes by the alpha particle energy loss method

C. Kaiser, Y. Levy, T. Tiedje, Jeff F. Young, and I. Kelson

Appl. Phys. Lett. 80, 2607 (2002); http://dx.doi.org/10.1063/1.1468268 (3 pages) | Cited 1 time

Online Publication Date: 2 April 2002

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Alpha particle energy loss (AEL) spectroscopy was used to characterize a 5 μm pitch grating of silicon bars on a silicon dioxide membrane. Comparison of the data with simulated spectra shows that the angle of nonvertical grating sidewalls are readily quantified by AEL. The potential of AEL for distinguishing undercut and overcut etch profiles is assessed. © 2002 American Institute of Physics.
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06.30.Bp Spatial dimensions (e.g., position, lengths, volume, angles, and displacements)
81.65.Cf Surface cleaning, etching, patterning
79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces
61.85.+p Channeling phenomena (blocking, energy loss, etc.)
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