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15 Apr 2002

Volume 80, Issue 15, pp. 2625-2806

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Thermoelectron-enhanced micrometer-scale plasma generation

Tsuyohito Ito and Kazuo Terashima

Appl. Phys. Lett. 80, 2648 (2002); http://dx.doi.org/10.1063/1.1468898 (3 pages) | Cited 38 times

Online Publication Date: 10 April 2002

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The use of thermoelectrons allowed easy generation of a micrometer-scale very high-frequency plasma (thermoelectron-enhanced micrometer-scale plasma) in a fine capillary, with an inner diameter of approximately 120 μm. A tungsten wire, whose diameter was 25 μm, inserted into the region was used to provide thermoelectrons. Approximately 5 W of power was sufficient to sustain this plasma. The plasma was very stable and the discharge continued for at least 60 min. © 2002 American Institute of Physics.
Show PACS
52.50.Gj Plasma heating by particle beams
52.80.Pi High-frequency and RF discharges
52.35.-g Waves, oscillations, and instabilities in plasmas and intense beams
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