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29 Apr 2002

Volume 80, Issue 17, pp. 3033-3231

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Erratum: “Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors” [Appl. Phys. Lett. 80, 1580 (2002)]

T.-C. Shen, J.-Y. Ji, M. A. Zudov, R.-R. Du, J. S. Kline, and J. R. Tucker

Appl. Phys. Lett. 80, 3231 (2002); http://dx.doi.org/10.1063/1.1476066 (1 page)

Online Publication Date: 22 April 2002

Full Text: Read Online (HTML) | Download PDF

Abstract Unavailable
Show PACS
61.72.uf Ge and Si
85.40.Ry Impurity doping, diffusion and ion implantation technology
81.05.Cy Elemental semiconductors
73.61.Cw Elemental semiconductors
71.55.Cn Elemental semiconductors
72.80.Cw Elemental semiconductors
61.72.S- Impurities in crystals
73.50.Dn Low-field transport and mobility; piezoresistance
73.50.Jt Galvanomagnetic and other magnetotransport effects (including thermomagnetic effects)
99.10.Cd Errata
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