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29 Apr 2002

Volume 80, Issue 17, pp. 3033-3231

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Principle and application of a thermal probe to reactive plasmas

E. Stamate, H. Sugai, and K. Ohe

Appl. Phys. Lett. 80, 3066 (2002); http://dx.doi.org/10.1063/1.1473688 (3 pages) | Cited 13 times

Online Publication Date: 22 April 2002

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A thermal probe for plasma diagnostics is introduced. The method is based upon measuring the equilibrium temperature of a conducting sphere as a function of its applied bias. The resulting temperature–voltage characteristic is processed using a theoretical model that accounts for charge and thermodynamic balance. The thermal probe is capable of detecting negative ions and shows sensitivity to certain chemical reactions. Measurements performed in Ar, Ar/SF6, and O2 show good agreement among the plasma parameters using thermal and Langmuir probes. © 2002 American Institute of Physics.
Show PACS
52.70.-m Plasma diagnostic techniques and instrumentation
52.70.Ds Electric and magnetic measurements
52.25.-b Plasma properties
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