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1 Jul 2002

Volume 81, Issue 1, pp. 1-184

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Fabrication of 10 nm enclosed nanofluidic channels

Han Cao, Zhaoning Yu, Jian Wang, Jonas O. Tegenfeldt, Robert H. Austin, Erli Chen, Wei Wu, and Stephen Y. Chou

Appl. Phys. Lett. 81, 174 (2002); http://dx.doi.org/10.1063/1.1489102 (3 pages) | Cited 123 times

Online Publication Date: 25 June 2002

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We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The nanofluidic channels were further narrowed and sealed by techniques that are based on nonuniform deposition. The resulting sealed channels have a cross section as small as 10 nm by 50 nm, of great importance for confining biological molecules into ultrasmall spaces. These techniques can be valuable fabrication tools for Nanoelectromechanical Systems and Micro/Nano Total Analysis Systems. © 2002 American Institute of Physics.
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
85.35.-p Nanoelectronic devices
87.15.-v Biomolecules: structure and physical properties
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