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23 Dec 2002

Volume 81, Issue 26, pp. 4895-5074

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Hundred-micron-sized all-solid-state Li secondary battery arrays embedded in a Si substrate

K. Kushida, K. Kuriyama, and T. Nozaki

Appl. Phys. Lett. 81, 5066 (2002); http://dx.doi.org/10.1063/1.1531220 (3 pages) | Cited 14 times

Online Publication Date: 17 December 2002

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Fabrication and charge/discharge behaviors of all-solid-state Li secondary battery arrays embedded into three Si trenches of 200×100 μm2 in area and 0.5 ∼ 2.0 μm in depth are presented. The battery arrays in a Si wafer, consisting of multiple layers (Al current collector/Li/SiO2–15 at. %P2O5/LiMn2O4/polycrystalline silicon current collector), are prepared by combining a sol-gel spin-coating method and Si very-large-scale integration technologies. Porous spin-on glass (SiO2–15 at. %P2O5) is adopted as an electrolyte layer, in which spatial paths for Li+ ions are artificially introduced into the glass. Each active battery area is isolated with double insulating walls (Si3N4/SiO2). The battery arrays demonstrate a constant capacity of ∼ 9.2 μA h cm−2 at ∼ 3.6 V up to 100 cycles. © 2002 American Institute of Physics.
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85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology
84.30.Jc Power electronics; power supply circuits

Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance

Vu Ngoc Hung, Takashi Abe, Phan Ngoc Minh, and Masayoshi Esashi

Appl. Phys. Lett. 81, 5069 (2002); http://dx.doi.org/10.1063/1.1532750 (3 pages) | Cited 8 times

Online Publication Date: 17 December 2002

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A miniaturized highly sensitive single-chip multichannel quartz-crystal microbalance prepared by deep reactive ion etching is presented. In the present work, quartz resonators in a single-chip with the diameters in the range 0.05–1.0 mm and thicknesses in the range 18–82 μm were fabricated. The conductance measurements carried out on the resonators showed that the Q factor is inversely proportional to resonator thickness. The Q-factor value as high as ∼30 000 has been observed in case of a 94 MHz resonator whose diameter is 1 mm and the thickness 17.8 μm. The Q factor of a resonator of very small diameter (0.1 mm) reached the value 5700. © 2002 American Institute of Physics.
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07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
77.65.Fs Electromechanical resonance; quartz resonators
07.10.Lw Balance systems, tensile machines, etc.
06.30.Dr Mass and density
85.50.-n Dielectric, ferroelectric, and piezoelectric devices
81.65.Cf Surface cleaning, etching, patterning

Easily monitored entangled state

M. A. Can, A. A. Klyachko, and A. S. Shumovsky

Appl. Phys. Lett. 81, 5072 (2002); http://dx.doi.org/10.1063/1.1521262 (3 pages) | Cited 7 times

Online Publication Date: 17 December 2002

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We discuss the generation and monitoring of durable atomic entangled state via Raman-type process, which can be used in the quantum information processing. © 2002 American Institute of Physics.
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03.67.-a Quantum information
42.50.-p Quantum optics
32.30.Bv Radio-frequency, microwave, and infrared spectra
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