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29 Jul 2002

Volume 81, Issue 5, pp. 789-944

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Carbon nanotube scanning probe for profiling of deep-ultraviolet and 193 nm photoresist patterns

Cattien V. Nguyen, Ramsey M. D. Stevens, Jabulani Barber, Jie Han, M. Meyyappan, Martha I. Sanchez, Carl Larson, and William D. Hinsberg

Appl. Phys. Lett. 81, 901 (2002); http://dx.doi.org/10.1063/1.1496139 (3 pages) | Cited 31 times

Online Publication Date: 22 July 2002

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The continual scaling down of complementary metal–oxide semiconductor feature size to 100 nm and below necessitates a characterization technique to resolve high-aspect-ratio features in the nanoscale regime. We report the use of atomic force microscopy coupled with high-aspect-ratio multiwalled carbon nanotube (MWCNT) scanning probe tip for the purpose of imaging surface profile of photoresists. MWCNT tips of 5–10 nm in diameter and about a micron long are used. Their exceptional mechanical strength and ability to buckle reversibly enable resolution of steep, deep nanoscale features. Images of photoresist patterns generated by 257 nm interference lithography as well as 193 nm lithography are presented to demonstrate MWCNT scanning probe tips for applications in metrology. © 2002 American Institute of Physics.
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07.79.Lh Atomic force microscopes
68.37.Ps Atomic force microscopy (AFM)
81.16.Nd Micro- and nanolithography
85.35.Kt Nanotube devices
61.46.-w Structure of nanoscale materials
81.07.De Nanotubes
85.40.Hp Lithography, masks and pattern transfer

On the role of Ge in the growth of β-FeSi2 on silicon (100) surfaces

A. Zenkevich, P. I. Gaiduk, H. P. Gunnlaugsson, and G. Weyer

Appl. Phys. Lett. 81, 904 (2002); http://dx.doi.org/10.1063/1.1497185 (3 pages)

Online Publication Date: 22 July 2002

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The microstructure of β-FeSi2 silicide layers formed with the addition of Ge by pulsed laser deposition at 650 °C on (001) Si substrate has been investigated by transmission electron microscopy and Mössbauer spectroscopy. The Ge atoms are not incorporated in the silicide in noticeable amounts but the addition causes the growth of β-FeSi2 micrograins with a high density of specific twin lamellae, whereas Ge segregates in epitaxial SiGe alloy grains. © 2002 American Institute of Physics.
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68.55.A- Nucleation and growth
68.55.Ln Defects and impurities: doping, implantation, distribution, concentration, etc.
81.15.Fg Pulsed laser ablation deposition
68.35.Dv Composition, segregation; defects and impurities
76.80.+y Mössbauer effect; other γ-ray spectroscopy
61.72.Mm Grain and twin boundaries

Pt–WOx electrode structure for thin-film fuel cells

Kyung-Won Park, Kwang-Soon Ahn, Jong-Ho Choi, Yoon-Chae Nah, Young-Min Kim, and Yung-Eun Sung

Appl. Phys. Lett. 81, 907 (2002); http://dx.doi.org/10.1063/1.1497707 (3 pages) | Cited 26 times

Online Publication Date: 22 July 2002

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An electrode structure consisting of two phases of Pt and WOx for use in thin-film fuel cells was designed and fabricated using a cosputtering system with a Pt metal and a tungsten oxide target. The coexistence of a polycrystalline Pt nanosized phase and an amorphous tungsten oxide phase in the electrode layer was confirmed by transmission electron microscopic images and x-ray diffraction data. In addition, compared with a Pt thin-film electrode, the two-phase electrode of Pt and WOx showed excellent performance for the devices because of the improved activity of the Pt metallic phase and the spill-over effect of porous tungsten oxides. © 2002 American Institute of Physics.
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82.47.-a Applied electrochemistry
82.45.Fk Electrodes
68.55.-a Thin film structure and morphology

Electronic properties of multiwalled carbon nanotubes in an embedded vertical array

Jun Li, Ramsey Stevens, Lance Delzeit, Hou Tee Ng, Alan Cassell, Jie Han, and M. Meyyappan

Appl. Phys. Lett. 81, 910 (2002); http://dx.doi.org/10.1063/1.1496494 (3 pages) | Cited 65 times

Online Publication Date: 22 July 2002

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We demonstrate integration of carbon nanotubes into large scale vertically aligned electrode arrays, by filling the as-grown samples with conformal SiO2 using chemical vapor deposition. Subsequent mechanical polishing yields a flat surface with only the very ends of the nanotube array exposed. The electronic properties of individual carbon nanotubes in the array are measured using current-sensing atomic force microscopy. These vertical nanotube arrays are suitable for fabricating various electronic devices and sensors. © 2002 American Institute of Physics.
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73.63.Fg Nanotubes
81.07.De Nanotubes
68.37.Ps Atomic force microscopy (AFM)

Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems

Nathan R. Franklin, Qian Wang, Thomas W. Tombler, Ali Javey, Moonsub Shim, and Hongjie Dai

Appl. Phys. Lett. 81, 913 (2002); http://dx.doi.org/10.1063/1.1497710 (3 pages) | Cited 99 times

Online Publication Date: 22 July 2002

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A synthetic strategy is devised for reliable integration of long suspended single-walled carbon nanotubes into electrically addressable devices. The method involves patterned growth of nanotubes to bridge predefined molybdenum electrodes, and is versatile in yielding various microstructures comprised of suspended nanotubes that are electrically wired up. The approach affords single-walled nanotube devices without any postgrowth processing, and will find applications in scalable nanotube transistors (mobility up to 10 000 cm2/V s) and nanoelectromechanical systems based on nanowires. © 2002 American Institute of Physics.
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85.35.Kt Nanotube devices
73.63.Fg Nanotubes
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
85.65.+h Molecular electronic devices
81.07.De Nanotubes

Dynamic force microscopy in superfluid helium

F. D. Callaghan, X. Yu, and C. J. Mellor

Appl. Phys. Lett. 81, 916 (2002); http://dx.doi.org/10.1063/1.1496503 (3 pages) | Cited 5 times

Online Publication Date: 22 July 2002

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Piezoelectric quartz tuning forks have been used for topographic dynamic force imaging in superfluid helium and in high magnetic fields. This has been achieved by immobilizing one tine of the tuning fork to stabilize its behavior in superfluid. Images acquired at room temperature and at 50 K are also presented. Frequency–distance curves are shown to be markedly different in superfluid than in air due to a long-range fork–sample interaction in liquid. Evidence is presented that this is due to a change in the hydrodynamic effective mass of the fork as the gap between the fork and sample is reduced. In addition, Q-control has been implemented and used to both increase and decrease the quality factors of tuning forks in both vacuum and superfluid helium. © 2002 American Institute of Physics.
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07.79.Lh Atomic force microscopes
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
68.37.Ps Atomic force microscopy (AFM)
68.35.B- Structure of clean surfaces (and surface reconstruction)

Phase decomposition of a binary thin film on a patterned substrate

William C. Johnson and S. M. Wise

Appl. Phys. Lett. 81, 919 (2002); http://dx.doi.org/10.1063/1.1497193 (3 pages) | Cited 10 times

Online Publication Date: 22 July 2002

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Two-dimensional simulations of phase decomposition in a binary thin film, which is deposited on a patterned substrate, are performed using the Cahn–Hilliard equation. Phase formation, growth, coarsening, and the resulting two-phase microstructure are strongly influenced by the substrate geometry, film composition, and surface effects. Patterning the substrate can result in the formation of self-organized structures of various sizes and spacings and may provide a method for developing monolayers of periodic nanostructures from an initially homogeneous alloy. © 2002 American Institute of Physics.
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68.55.Nq Composition and phase identification
64.75.-g Phase equilibria
68.47.Pe Langmuir-Blodgett films on solids; polymers on surfaces; biological molecules on surfaces
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