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29 Jul 2002

Volume 81, Issue 5, pp. 789-944

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Role of trace impurities in large-volume noble gas atmospheric-pressure glow discharges

Xiaohui Yuan and Laxminarayan L. Raja

Appl. Phys. Lett. 81, 814 (2002); http://dx.doi.org/10.1063/1.1497445 (3 pages) | Cited 28 times

Online Publication Date: 22 July 2002

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A computational study of capacitively coupled atmospheric-pressure glow discharges in high-purity helium is presented, and the role of trace impurities in such noble gas plasmas is established. Trace impurities result in generation of significant amounts of charged species through Penning ionization and charge exchange reactions. The altered charged species balance in the plasma causes a large change in the discharge impedance when compared to a completely pure noble gas discharge. Peak electron temperatures of the order of 50 000 K and electron densities of order 1011 cm−3 are predicted. Significant electron generation is observed inside the sheath region due to the highly collisional nature of the plasma. This study underscores the importance of modeling the effect of even trace amounts of impurities in noble gas atmospheric-pressure glow discharges. © 2002 American Institute of Physics.
Show PACS
52.80.Hc Glow; corona
52.25.Vy Impurities in plasmas
52.40.Kh Plasma sheaths
52.20.Hv Atomic, molecular, ion, and heavy-particle collisions
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