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5 Aug 2002

Volume 81, Issue 6, pp. 951-1149

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Extraction of positive and negative ions from electron-beam-generated plasmas

S. G. Walton, D. Leonhardt, R. F. Fernsler, and R. A. Meger

Appl. Phys. Lett. 81, 987 (2002); http://dx.doi.org/10.1063/1.1498502 (3 pages) | Cited 15 times

Online Publication Date: 30 July 2002

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The results of investigations using pulsed, electron-beam-produced plasmas in Ar/SF6 mixtures are reported. Time-resolved, positive, and negative ion fluxes were measured at a biased electrode located adjacent to the plasma. The measurements indicate that plasmas form with large negative ion densities due to electron attachment to SF6 at the low electron temperatures associated with electron-beam-generated plasmas. © 2002 American Institute of Physics.
Show PACS
52.25.Jm Ionization of plasmas
52.40.Mj Particle beam interactions in plasmas
52.50.Gj Plasma heating by particle beams
07.77.Ka Charged-particle beam sources and detectors
52.25.-b Plasma properties

Neutral gas temperature estimate in CF4/O2/Ar inductively coupled plasmas

Brett A. Cruden, M. V. V. S. Rao, Surendra P. Sharma, and M. Meyyappan

Appl. Phys. Lett. 81, 990 (2002); http://dx.doi.org/10.1063/1.1497998 (3 pages) | Cited 10 times

Online Publication Date: 30 July 2002

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Neutral temperatures in inductively coupled CF4/O2/Ar mixture plasmas have been characterized by fitting the rotational envelope of emission spectra in a gaseous electronics conference reference cell. CF and CO are found to present different rotational temperatures with opposite trends with respect to pressure. It is proposed that CF is created as a rotationally and translationally hot molecule due to CF4 dissociation and the disparity in temperatures and temperature trend is indicative of incomplete equilibration of the CF with other neutral species in the plasma. This may have important consequences from the standpoint of understanding neutral reaction chemistries. © 2002 American Institute of Physics.
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52.25.-b Plasma properties
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
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