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19 Aug 2002

Volume 81, Issue 8, pp. 1369-1534

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Evidence of ionized metal clusters in ion plating discharges

A. D. Wilson, A. Davison, A. Leyland, A. Matthews, and K. S. Fancey

Appl. Phys. Lett. 81, 1405 (2002); http://dx.doi.org/10.1063/1.1501449 (3 pages) | Cited 1 time

Online Publication Date: 9 August 2002

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A quadropole mass-energy analyzer has been used to detect positively charged metal ions at the substrate (cathode) of an ion plating system. By studying titanium, evaporated into thermionically supported argon glow discharges at pressures of 1–4 Pa, we have detected the presence of ionized clusters of the vapor material up to the analyzer mass limit of 2500 a.m.u. In contrast, a similar analysis from an equivalent titanium-only discharge has revealed a relatively insignificant cluster detection rate. The results support an earlier prognosis that these clusters may nucleate and grow through vapor cooling, caused by collisions with gas atoms in the discharge. © 2002 American Institute of Physics.
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52.70.Nc Particle measurements
07.75.+h Mass spectrometers
52.77.Dq Plasma-based ion implantation and deposition
81.15.Jj Ion and electron beam-assisted deposition; ion plating

Temporally resolved cavity ring-down spectroscopy in a pulsed nitrogen plasma

A. P. Yalin, R. N. Zare, C. O. Laux, and C. H. Kruger

Appl. Phys. Lett. 81, 1408 (2002); http://dx.doi.org/10.1063/1.1500427 (3 pages) | Cited 14 times

Online Publication Date: 9 August 2002

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Cavity ring-down spectroscopy (CRDS) has enabled temporally resolved measurements of the N2+ ion concentration in a pulsed atmospheric pressure nitrogen plasma. A 10 ns voltage pulse is applied to a dc-sustained plasma to change the ionization fraction rapidly. Our measurements show that the pulse increases the N2+ ion concentration from 3.9×1012 to more than 1.5×1013 cm−3, and that the N2+ concentration returns to the dc level in about 10 μs. We also determine the electron density by measuring the electrical conductivity of the plasma. Because N2+ is the dominant ion, the good agreement between electrical and CRDS measurements provides validation of the temporally resolved CRDS technique. © 2002 American Institute of Physics.
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52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.25.-b Plasma properties
07.57.-c Infrared, submillimeter wave, microwave and radiowave instruments and equipment
07.60.-j Optical instruments and equipment
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