Tetragonal Pb(Zr0.35Ti0.65)O3 thin films were deposited at deposition temperatures ranging from 395 °C to 510 °C on (111)Pt/Ti/SiO2/Si, (111)Ir/TiO2/SiO2/Si, and (100)Ru/SiO2/Si substrates by metalorganic chemical vapor deposition. When the deposition temperature was above 415 °C, the remanent polarization (Pr) and the coercive field (Ec) were almost the same for the Pb(Zr0.35Ti0.65)O3 thin films deposited on these substrates. This means that the electrical properties were not significantly affected by the type of substrate above 415 °C. However, at 395 °C, the film deposited on the (111)Pt/Ti/SiO2/Si substrate showed a larger Pr value than those on the (111)Ir/TiO2/SiO2/Si and (100)Ru/SiO2/Si substrates. The lower crystallinity of the films deposited on the (111)Ir/TiO2/SiO2/Si and (100)Ru/SiO2/Si substrates, due to the oxidation of the Ir and Ru surfaces before starting film deposition, thwarts the attainment of good ferroelectricity. © 2003 American Institute of Physics.