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27 Jan 2003

Volume 82, Issue 4, pp. 487-659

Issue Cover Spotlight Figure

Appl. Phys. Lett. 82, 559 (2003); http://dx.doi.org/10.1063/1.1539543 (3 pages)

P. R. C. Kent and Alex Zunger
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Structure of direct-current microdischarge plasmas in helium

Prashanth S. Kothnur, Xiaohui Yuan, and Laxminarayan L. Raja

Appl. Phys. Lett. 82, 529 (2003); http://dx.doi.org/10.1063/1.1540246 (3 pages) | Cited 11 times

Online Publication Date: 22 January 2003

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A one-dimensional, self-consistent, continuum model is used to elucidate plasma phenomena in a parallel-plate dc microdischarge with a 250 μm gap at a pressure of 250 Torr. The microdischarge is found to have a bulk plasma region and a cathode sheath region with sizes that are comparable. Depending on the discharge current densities, peak electron densities of order up to 1014 cm−3 are predicted. Electron temperature of several eV are predicted within the cathode sheath while temperatures between 2 and 3 eV are observed in the bulk plasma. Gas temperatures of the order of 1000 K are predicted, emphasizing the importance of gas heating phenomena in dc microdischarges. © 2003 American Institute of Physics.
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52.80.-s Electric discharges
52.20.-j Elementary processes in plasmas
52.40.Kh Plasma sheaths
52.25.Kn Thermodynamics of plasmas
52.70.-m Plasma diagnostic techniques and instrumentation
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