APL Nameplate
  • Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

Flickr Twitter iResearch App Facebook

BROWSE VOLUMES

Year Range: 
Search Issue | RSS Feeds RSS
Previous Issue Next Issue

17 Nov 2003

Volume 83, Issue 20, pp. 4083-4258

Issue Cover Spotlight Figure

Appl. Phys. Lett. 83, 4238 (2003); http://dx.doi.org/10.1063/1.1627935 (3 pages)

H. B. Peng, T. G. Ristroph, G. M. Schurmann, G. M. King, J. Yoon, V. Narayanamurti, and J. A. Golovchenko
Enlarge Image | Read More
Return to All Sections
back to top
RSS Feeds

Dielectric characteristics of low-permittivity silicate using electron beam direct patterning for intermetal dielectric applications

Po-Tsun Liu, T. C. Chang, T. M. Tsai, Z. W. Lin, C. W. Chen, B. C. Chen, and S. M. Sze

Appl. Phys. Lett. 83, 4226 (2003); http://dx.doi.org/10.1063/1.1628401 (3 pages) | Cited 4 times

Online Publication Date: 12 November 2003

Full Text: Read Online (HTML) | Download PDF

Show Abstract
A direct patterning technology of low-permittivity silicate-based polymer is investigated with electron-beam lithography for multilevel interconnections. The smallest feature size of 60 nm for damascene lines can be directly patterned in the silicate film. In this direct patterning, dielectric regions exposed by electron beam are crosslinked and form desirable patterns, while the others are dissolvable in an aqueous solution containing 2.38% tetramethylammonium hydroxide. With an optimum condition of electron-beam lithography, the electron-beam-irradiated silicate exhibits superior dielectric properties than that of the furnace-cured silicate film, due to minimizing the break of Si–H bonds and moisture uptake. The explanation is in agreement with the analyses of Fourier transform infrared spectroscopy and thermal desorption spectroscopy. © 2003 American Institute of Physics.
Show PACS
85.40.Hp Lithography, masks and pattern transfer
77.84.Jd Polymers; organic compounds
85.40.Ls Metallization, contacts, interconnects; device isolation
77.22.Ch Permittivity (dielectric function)
77.55.-g Dielectric thin films

Use of the final thermally stimulated discharge current technique to analyze space charge behavior in dielectrics

E. R. Neagu

Appl. Phys. Lett. 83, 4229 (2003); http://dx.doi.org/10.1063/1.1626790 (3 pages) | Cited 2 times

Online Publication Date: 12 November 2003

Full Text: Read Online (HTML) | Download PDF

Show Abstract
The final thermally stimulated discharge current technique is proposed for analyzing space charge (SC) trapping/detrapping. The letter investigates the effects associated with SC behavior in polyamide 11 in an attempt to discriminate between dipolar and SC related effects. An apparent peak, located 5–13 °C above the charging temperature, and a second peak around 96 °C were observed. Both peaks scale linearly with the field revealing a similar behavior of dipolar and interfacial polarization. The peaks position and the apparent activation energy W do not change with the charging field, but are very sensitive to the previous charging/discharging times. A distribution of the apparent activation energies in a range from 0.45 to 2.20 eV is revealed for the apparent peaks. The isothermal decay of SC at 35 °C is proportional to log t, a behavior that may be characteristic for the interfacial polarization. © 2003 American Institute of Physics.
Show PACS
77.84.Jd Polymers; organic compounds
77.22.Ej Polarization and depolarization
77.22.Jp Dielectric breakdown and space-charge effects

Nanoscale domains and local piezoelectric hysteresis in Pb(Zn1/3Nb2/3)O3-4.5%PbTIO3 single crystals

I. K. Bdikin, V. V. Shvartsman, and A. L. Kholkin

Appl. Phys. Lett. 83, 4232 (2003); http://dx.doi.org/10.1063/1.1627476 (3 pages) | Cited 49 times

Online Publication Date: 12 November 2003

Full Text: Read Online (HTML) | Download PDF

Show Abstract
High-resolution domain studies have been performed in Pb(Zn1/3Nb2/3)O3-4.5%PbTiO3 (PZN-PT) single crystals via piezoresponse force microscopy (PFM). Irregular domain patterns with the typical sizes 20–100 nm have been observed on the (001)-oriented surfaces of unpoled samples. On the contrary, (111) crystal cuts exhibit normal micron-sized regular domains with the domain boundaries directed along allowed crystallographic planes. The existence of nanodomains in (001)-oriented crystals is tentatively attributed to the relaxor nature of PZN-PT where small polar clusters may form under zero-field-cooling conditions. These nanodomains are considered as the nuclei of the opposite polarization state and can be responsible for the smaller coercive field for this particular crystal cut. However, local piezoelectric hysteresis performed by PFM on the nanometer scale indicates similar switching behavior of PZN-PT for both investigated crystallographic orientations. © 2003 American Institute of Physics.
Show PACS
77.84.Ek Niobates and tantalates
77.84.Cg PZT ceramics and other titanates
77.80.Dj Domain structure; hysteresis
77.65.-j Piezoelectricity and electromechanical effects
77.22.Ej Polarization and depolarization
77.80.Fm Switching phenomena
Return to All Sections
Close

Google Calendar

ADVERTISEMENT

Go to AIP Home   © AIP Publishing LLC
close