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14 Jul 2003

Volume 83, Issue 2, pp. 207-403

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Appl. Phys. Lett. 83, 225 (2003); http://dx.doi.org/10.1063/1.1591241 (3 pages)

A. Borowiec, D. M. Bruce, Daniel T. Cassidy, and H. K. Haugen
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Laser-induced plasmas in micromachined fused silica cavities

Xianzhong Zeng, Samuel S. Mao, Chunyi Liu, Xianglei Mao, Ralph Greif, and Richard E. Russo

Appl. Phys. Lett. 83, 240 (2003); http://dx.doi.org/10.1063/1.1591996 (3 pages) | Cited 11 times

Online Publication Date: 8 July 2003

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Cavity formation is a frequent result in many laser ablation applications. Although most theoretical investigations have been devoted to laser ablation on a flat surface, the development of a laser plasma inside a cavity is of both fundamental as well as practical significance. In this study, the temperature and electron number density of laser-induced plasmas in fused silica cavities were determined using spectroscopic methods. The effects of cavity aspect ratio on plasma properties were investigated. The temperature and electron number density of laser-induced plasma were measured to be much higher and to decrease faster for a plasma inside a cavity than on the flat surface. Cavity wall influences on the plasma expansion are discussed. © 2003 American Institute of Physics.
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52.38.Mf Laser ablation
52.50.Jm Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)
52.25.-b Plasma properties
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
79.20.Ds Laser-beam impact phenomena

Ion flux nonuniformities in large-area high-frequency capacitive discharges

A. Perret, P. Chabert, J.-P. Booth, J. Jolly, J. Guillon, and Ph. Auvray

Appl. Phys. Lett. 83, 243 (2003); http://dx.doi.org/10.1063/1.1592617 (3 pages) | Cited 41 times

Online Publication Date: 8 July 2003

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Strong nonuniformities of plasma production are expected in capacitive discharges if the excitation wavelength becomes comparable to the reactor size (standing-wave effect) and/or if the plasma skin depth becomes comparable to the plate separation (skin effect) [M. A. Lieberman et al., Plasma Sources Sci. Technol. 11, 283 (2002)]. Ion flux uniformity measurements were carried out in a large-area square (40 cm×40 cm) capacitive discharge driven at frequencies between 13.56 MHz and 81.36 MHz in argon gas at 150 mTorr. At 13.56 MHz, the ion flux was uniform to ±5%. At 60 MHz (and above) and at low rf power, the standing-wave effect was seen (maximum of the ion flux at the center), in good quantitative agreement with theory. At higher rf power, maxima of the ion flux were observed at the edges, due either to the skin effect or to other edge effects. © 2003 American Institute of Physics.
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52.80.Pi High-frequency and RF discharges
52.50.-b Plasma production and heating
52.25.-b Plasma properties
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